JPS5688103A - Diffraction grating - Google Patents
Diffraction gratingInfo
- Publication number
- JPS5688103A JPS5688103A JP16513579A JP16513579A JPS5688103A JP S5688103 A JPS5688103 A JP S5688103A JP 16513579 A JP16513579 A JP 16513579A JP 16513579 A JP16513579 A JP 16513579A JP S5688103 A JPS5688103 A JP S5688103A
- Authority
- JP
- Japan
- Prior art keywords
- diffraction grating
- vapor deposition
- grating
- deposition
- beforehand
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Spectrometry And Color Measurement (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
Abstract
PURPOSE: To inexpensively produce a precision diffraction grating by changing the sectional shape of an original grating by depositing means such as vapor deposition having directivity to the diffraction grating having beforehand been formed to a prescribed shape.
CONSTITUTION: A evaporating source VPS of the same material as that of the base BA of the diffraction grating having beforehand been formed to a prescribed shape is placed in a position sufficiently apart from the base BA and vapor deposition is performed diagonally from the direction orthogonal to the grooves of the grating. A deposition layer PL2 is formed on said deposition layer PL1 while continuouly varying incident angles, and a reflection layer BS of Au or Al is formed thereon. It is equally well to use an ion beam sputtering method in place of vapor deposition and at the time of forming the deposition layer PL2, it is desirable to carry out vapor deposition while applying white light to the diffraction grating and supervising the same. Thereby, the precision diffraction grating is inexpensively manufactured.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16513579A JPS5688103A (en) | 1979-12-19 | 1979-12-19 | Diffraction grating |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16513579A JPS5688103A (en) | 1979-12-19 | 1979-12-19 | Diffraction grating |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5688103A true JPS5688103A (en) | 1981-07-17 |
Family
ID=15806556
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16513579A Pending JPS5688103A (en) | 1979-12-19 | 1979-12-19 | Diffraction grating |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5688103A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103376485A (en) * | 2012-04-12 | 2013-10-30 | 福州高意光学有限公司 | Method for producing grating by utilizing coating technique |
-
1979
- 1979-12-19 JP JP16513579A patent/JPS5688103A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103376485A (en) * | 2012-04-12 | 2013-10-30 | 福州高意光学有限公司 | Method for producing grating by utilizing coating technique |
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