JPS568490B2 - - Google Patents

Info

Publication number
JPS568490B2
JPS568490B2 JP3617975A JP3617975A JPS568490B2 JP S568490 B2 JPS568490 B2 JP S568490B2 JP 3617975 A JP3617975 A JP 3617975A JP 3617975 A JP3617975 A JP 3617975A JP S568490 B2 JPS568490 B2 JP S568490B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3617975A
Other languages
Japanese (ja)
Other versions
JPS51110974A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3617975A priority Critical patent/JPS568490B2/ja
Publication of JPS51110974A publication Critical patent/JPS51110974A/ja
Publication of JPS568490B2 publication Critical patent/JPS568490B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Control Of Position Or Direction (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP3617975A 1975-03-25 1975-03-25 Expired JPS568490B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3617975A JPS568490B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-03-25 1975-03-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3617975A JPS568490B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-03-25 1975-03-25

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP8579380A Division JPS568822A (en) 1980-06-23 1980-06-23 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS51110974A JPS51110974A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1976-09-30
JPS568490B2 true JPS568490B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-02-24

Family

ID=12462499

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3617975A Expired JPS568490B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-03-25 1975-03-25

Country Status (1)

Country Link
JP (1) JPS568490B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5911619A (ja) * 1982-07-12 1984-01-21 Nec Corp 半導体装置の非接触試験方法
JPS59141230A (ja) * 1983-02-02 1984-08-13 Mitsubishi Electric Corp パタ−ン形成方法
JPH0817150B2 (ja) * 1986-08-13 1996-02-21 日本電気株式会社 半導体製造装置の位置合わせ方法
JPS6351631A (ja) * 1986-08-20 1988-03-04 Sanyo Electric Co Ltd 半導体装置の製造方法
JP2711669B2 (ja) * 1988-02-26 1998-02-10 三菱電機株式会社 半導体装置およびその製造方法

Also Published As

Publication number Publication date
JPS51110974A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1976-09-30

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