JPS5683031A - Detecting method of mark position - Google Patents

Detecting method of mark position

Info

Publication number
JPS5683031A
JPS5683031A JP16102479A JP16102479A JPS5683031A JP S5683031 A JPS5683031 A JP S5683031A JP 16102479 A JP16102479 A JP 16102479A JP 16102479 A JP16102479 A JP 16102479A JP S5683031 A JPS5683031 A JP S5683031A
Authority
JP
Japan
Prior art keywords
volume
slit
signal
scanning
rectangular beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16102479A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6142409B2 (enrdf_load_stackoverflow
Inventor
Yoshiaki Goto
Yasuo Furukawa
Seigo Igaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP16102479A priority Critical patent/JPS5683031A/ja
Publication of JPS5683031A publication Critical patent/JPS5683031A/ja
Publication of JPS6142409B2 publication Critical patent/JPS6142409B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H01J37/3045—Object or beam position registration

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
JP16102479A 1979-12-12 1979-12-12 Detecting method of mark position Granted JPS5683031A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16102479A JPS5683031A (en) 1979-12-12 1979-12-12 Detecting method of mark position

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16102479A JPS5683031A (en) 1979-12-12 1979-12-12 Detecting method of mark position

Publications (2)

Publication Number Publication Date
JPS5683031A true JPS5683031A (en) 1981-07-07
JPS6142409B2 JPS6142409B2 (enrdf_load_stackoverflow) 1986-09-20

Family

ID=15727129

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16102479A Granted JPS5683031A (en) 1979-12-12 1979-12-12 Detecting method of mark position

Country Status (1)

Country Link
JP (1) JPS5683031A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4942093A (en) * 1988-09-09 1990-07-17 Bridgestone/Firestone, Inc. Adhesive system for bonding uncured rubber to cured polyurethane

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54118778A (en) * 1978-03-08 1979-09-14 Cho Lsi Gijutsu Kenkyu Kumiai Method of detecting pattern
JPS562628A (en) * 1979-06-20 1981-01-12 Chiyou Lsi Gijutsu Kenkyu Kumiai Method of aligning position through charged beam

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54118778A (en) * 1978-03-08 1979-09-14 Cho Lsi Gijutsu Kenkyu Kumiai Method of detecting pattern
JPS562628A (en) * 1979-06-20 1981-01-12 Chiyou Lsi Gijutsu Kenkyu Kumiai Method of aligning position through charged beam

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4942093A (en) * 1988-09-09 1990-07-17 Bridgestone/Firestone, Inc. Adhesive system for bonding uncured rubber to cured polyurethane

Also Published As

Publication number Publication date
JPS6142409B2 (enrdf_load_stackoverflow) 1986-09-20

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