JPS567438A - Annealing device for semiconductor which use laser - Google Patents

Annealing device for semiconductor which use laser

Info

Publication number
JPS567438A
JPS567438A JP8284879A JP8284879A JPS567438A JP S567438 A JPS567438 A JP S567438A JP 8284879 A JP8284879 A JP 8284879A JP 8284879 A JP8284879 A JP 8284879A JP S567438 A JPS567438 A JP S567438A
Authority
JP
Japan
Prior art keywords
laser
wafer
mirror
base
output
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8284879A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6227532B2 (enExample
Inventor
Tadashi Nishimura
Yoichi Akasaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP8284879A priority Critical patent/JPS567438A/ja
Publication of JPS567438A publication Critical patent/JPS567438A/ja
Publication of JPS6227532B2 publication Critical patent/JPS6227532B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P34/00—Irradiation with electromagnetic or particle radiation of wafers, substrates or parts of devices
    • H10P34/40—Irradiation with electromagnetic or particle radiation of wafers, substrates or parts of devices with high-energy radiation
    • H10P34/42—Irradiation with electromagnetic or particle radiation of wafers, substrates or parts of devices with high-energy radiation with electromagnetic radiation, e.g. laser annealing

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Recrystallisation Techniques (AREA)
JP8284879A 1979-06-28 1979-06-28 Annealing device for semiconductor which use laser Granted JPS567438A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8284879A JPS567438A (en) 1979-06-28 1979-06-28 Annealing device for semiconductor which use laser

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8284879A JPS567438A (en) 1979-06-28 1979-06-28 Annealing device for semiconductor which use laser

Publications (2)

Publication Number Publication Date
JPS567438A true JPS567438A (en) 1981-01-26
JPS6227532B2 JPS6227532B2 (enExample) 1987-06-15

Family

ID=13785792

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8284879A Granted JPS567438A (en) 1979-06-28 1979-06-28 Annealing device for semiconductor which use laser

Country Status (1)

Country Link
JP (1) JPS567438A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62259437A (ja) * 1986-05-02 1987-11-11 Asahi Glass Co Ltd レ−ザ−アニ−ル装置
KR100278977B1 (ko) * 1997-08-30 2001-02-01 구본준 레이저 장비
US8314360B2 (en) * 2005-09-26 2012-11-20 Ultratech, Inc. Apparatuses and methods for irradiating a substrate to avoid substrate edge damage

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012084620A (ja) * 2010-10-08 2012-04-26 Mitsubishi Electric Corp レーザ加工装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5437472A (en) * 1977-08-29 1979-03-19 Hitachi Ltd Manufacture of semiconductor

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5437472A (en) * 1977-08-29 1979-03-19 Hitachi Ltd Manufacture of semiconductor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62259437A (ja) * 1986-05-02 1987-11-11 Asahi Glass Co Ltd レ−ザ−アニ−ル装置
KR100278977B1 (ko) * 1997-08-30 2001-02-01 구본준 레이저 장비
US8314360B2 (en) * 2005-09-26 2012-11-20 Ultratech, Inc. Apparatuses and methods for irradiating a substrate to avoid substrate edge damage

Also Published As

Publication number Publication date
JPS6227532B2 (enExample) 1987-06-15

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