JPS5670869A - Spinner coating apparatus - Google Patents

Spinner coating apparatus

Info

Publication number
JPS5670869A
JPS5670869A JP14656579A JP14656579A JPS5670869A JP S5670869 A JPS5670869 A JP S5670869A JP 14656579 A JP14656579 A JP 14656579A JP 14656579 A JP14656579 A JP 14656579A JP S5670869 A JPS5670869 A JP S5670869A
Authority
JP
Japan
Prior art keywords
temp
adsorption head
signal
resistance wire
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14656579A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6222661B2 (enrdf_load_stackoverflow
Inventor
Tsutomu Hanno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP14656579A priority Critical patent/JPS5670869A/ja
Publication of JPS5670869A publication Critical patent/JPS5670869A/ja
Publication of JPS6222661B2 publication Critical patent/JPS6222661B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP14656579A 1979-11-14 1979-11-14 Spinner coating apparatus Granted JPS5670869A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14656579A JPS5670869A (en) 1979-11-14 1979-11-14 Spinner coating apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14656579A JPS5670869A (en) 1979-11-14 1979-11-14 Spinner coating apparatus

Publications (2)

Publication Number Publication Date
JPS5670869A true JPS5670869A (en) 1981-06-13
JPS6222661B2 JPS6222661B2 (enrdf_load_stackoverflow) 1987-05-19

Family

ID=15410543

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14656579A Granted JPS5670869A (en) 1979-11-14 1979-11-14 Spinner coating apparatus

Country Status (1)

Country Link
JP (1) JPS5670869A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63111979U (enrdf_load_stackoverflow) * 1987-01-14 1988-07-19
JPH0286826A (ja) * 1989-07-07 1990-03-27 Hitachi Ltd 被加工物の処理方法
JPH04363169A (ja) * 1991-05-08 1992-12-16 Hitachi Ltd フォトレジストの塗布方法
JPH0824621A (ja) * 1995-07-17 1996-01-30 Hitachi Ltd 処理液の滴下方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63111979U (enrdf_load_stackoverflow) * 1987-01-14 1988-07-19
JPH0286826A (ja) * 1989-07-07 1990-03-27 Hitachi Ltd 被加工物の処理方法
JPH04363169A (ja) * 1991-05-08 1992-12-16 Hitachi Ltd フォトレジストの塗布方法
JPH0824621A (ja) * 1995-07-17 1996-01-30 Hitachi Ltd 処理液の滴下方法

Also Published As

Publication number Publication date
JPS6222661B2 (enrdf_load_stackoverflow) 1987-05-19

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