JPS5670869A - Spinner coating apparatus - Google Patents
Spinner coating apparatusInfo
- Publication number
- JPS5670869A JPS5670869A JP14656579A JP14656579A JPS5670869A JP S5670869 A JPS5670869 A JP S5670869A JP 14656579 A JP14656579 A JP 14656579A JP 14656579 A JP14656579 A JP 14656579A JP S5670869 A JPS5670869 A JP S5670869A
- Authority
- JP
- Japan
- Prior art keywords
- temp
- adsorption head
- signal
- resistance wire
- circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Coating Apparatus (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14656579A JPS5670869A (en) | 1979-11-14 | 1979-11-14 | Spinner coating apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14656579A JPS5670869A (en) | 1979-11-14 | 1979-11-14 | Spinner coating apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5670869A true JPS5670869A (en) | 1981-06-13 |
JPS6222661B2 JPS6222661B2 (US20030204162A1-20031030-M00001.png) | 1987-05-19 |
Family
ID=15410543
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14656579A Granted JPS5670869A (en) | 1979-11-14 | 1979-11-14 | Spinner coating apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5670869A (US20030204162A1-20031030-M00001.png) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63111979U (US20030204162A1-20031030-M00001.png) * | 1987-01-14 | 1988-07-19 | ||
JPH0286826A (ja) * | 1989-07-07 | 1990-03-27 | Hitachi Ltd | 被加工物の処理方法 |
JPH04363169A (ja) * | 1991-05-08 | 1992-12-16 | Hitachi Ltd | フォトレジストの塗布方法 |
JPH0824621A (ja) * | 1995-07-17 | 1996-01-30 | Hitachi Ltd | 処理液の滴下方法 |
-
1979
- 1979-11-14 JP JP14656579A patent/JPS5670869A/ja active Granted
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63111979U (US20030204162A1-20031030-M00001.png) * | 1987-01-14 | 1988-07-19 | ||
JPH0520469Y2 (US20030204162A1-20031030-M00001.png) * | 1987-01-14 | 1993-05-27 | ||
JPH0286826A (ja) * | 1989-07-07 | 1990-03-27 | Hitachi Ltd | 被加工物の処理方法 |
JPH04363169A (ja) * | 1991-05-08 | 1992-12-16 | Hitachi Ltd | フォトレジストの塗布方法 |
JPH0824621A (ja) * | 1995-07-17 | 1996-01-30 | Hitachi Ltd | 処理液の滴下方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS6222661B2 (US20030204162A1-20031030-M00001.png) | 1987-05-19 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5670869A (en) | Spinner coating apparatus | |
GR65200B (en) | Controller of temperature for electric heating apparatus especially for electric roasting hearths | |
JPS51124845A (en) | High-frequency wave heating apparatus | |
JPS6426136A (en) | Heat quantity measuring instrument | |
JPS5226641A (en) | Heating elements | |
JPS51127742A (en) | Temperature control device | |
NZ184353A (en) | Electric resistance heating of furnace | |
JPS55154451A (en) | Production of substrate for gas sensor | |
JPS5527208A (en) | Heat sensitive recording apparatus | |
FR2279095A1 (fr) | Procede de mesure du coefficient de transfert de chaleur | |
JPS53106077A (en) | Temperature measuring method of drawing materials in drawing line | |
JPS5544931A (en) | Temperature characteristics tester | |
JPS51124966A (en) | Method and apparatus of wind velocity measurement | |
Anisimov | Unit for Regulating Annealing Degree of Wire During Its Rewinding | |
JPS53123263A (en) | Heating apparatus for hair dryer | |
JPS5279339A (en) | Temperature control method of electric furnace | |
FR2369805A1 (fr) | Chauffage pour motocycliste | |
Hust et al. | Standard reference materials: Thermal conductivity and electrical resistivity standard reference materials: Austenitic stainless steel, SRM's 735 and 798, from 4 to 1200 K[Final Report] | |
JPS5471285A (en) | Temperature controller of electric heater | |
JPS5258139A (en) | Method of producing heater using positive characteristic thermistor | |
JPS5253539A (en) | Heating equipment | |
JPS54136441A (en) | Heat-generating body | |
Naumov et al. | Standard Samples for Specific Electrical Conductivity Measurements | |
JPS6431422A (en) | Method of controlling plasma density | |
JPS63168986U (US20030204162A1-20031030-M00001.png) |