JPS567018A - Flow meter - Google Patents
Flow meterInfo
- Publication number
- JPS567018A JPS567018A JP8502380A JP8502380A JPS567018A JP S567018 A JPS567018 A JP S567018A JP 8502380 A JP8502380 A JP 8502380A JP 8502380 A JP8502380 A JP 8502380A JP S567018 A JPS567018 A JP S567018A
- Authority
- JP
- Japan
- Prior art keywords
- flow meter
- meter
- flow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
- G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
- G01F1/692—Thin-film arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6842—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow with means for influencing the fluid flow
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Volume Flow (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19792925975 DE2925975A1 (de) | 1979-06-27 | 1979-06-27 | Mengendurchflussmesser |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS567018A true JPS567018A (en) | 1981-01-24 |
Family
ID=6074310
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8502380A Pending JPS567018A (en) | 1979-06-27 | 1980-06-23 | Flow meter |
Country Status (4)
Country | Link |
---|---|
US (1) | US4320655A (ja) |
EP (1) | EP0021291A1 (ja) |
JP (1) | JPS567018A (ja) |
DE (1) | DE2925975A1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58160488U (ja) * | 1982-04-21 | 1983-10-26 | 株式会社芝浦電子製作所 | セラミツクヒ−タ・センサ |
JPS6140513A (ja) * | 1984-08-01 | 1986-02-26 | Hitachi Ltd | 薄膜抵抗式空気流量検出装置及び薄膜抵抗式計測素子 |
US4735099A (en) * | 1984-05-09 | 1988-04-05 | Nippon Soken, Inc. | Direct-heated gas-flow measuring apparatus |
Families Citing this family (55)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3127081C2 (de) * | 1981-07-09 | 1985-01-24 | Degussa Ag, 6000 Frankfurt | Vorrichtung zur Messung der Strömungsgeschwindigkeit von Gasen und Flüssigkeiten |
DE3128882A1 (de) * | 1981-07-22 | 1983-02-10 | Degussa Ag, 6000 Frankfurt | Vorrichtung zur messung der stroemungsgeschwindigkeit von gasen und fluessigkeiten |
DE3138910A1 (de) * | 1981-09-30 | 1983-04-14 | Siemens AG, 1000 Berlin und 8000 München | Mengendurchflussmesser |
EP0076935B1 (en) * | 1981-10-09 | 1989-07-19 | Honeywell Inc. | Integrated semiconductor device and method of fabricating said device |
US4624137A (en) * | 1981-10-09 | 1986-11-25 | Honeywell Inc. | Semiconductor device |
DE3208096A1 (de) * | 1982-03-06 | 1983-09-15 | Robert Bosch Gmbh, 7000 Stuttgart | Messsonde zur bestimmung der masse und/oder temperatur eines stroemenden mediums |
US4433576A (en) * | 1982-09-20 | 1984-02-28 | General Motors Corporation | Mass airflow sensor |
US4478077A (en) * | 1982-09-30 | 1984-10-23 | Honeywell Inc. | Flow sensor |
US4501144A (en) * | 1982-09-30 | 1985-02-26 | Honeywell Inc. | Flow sensor |
US4825693A (en) * | 1982-09-30 | 1989-05-02 | Honeywell Inc. | Slotted diaphragm semiconductor device |
US4548078A (en) * | 1982-09-30 | 1985-10-22 | Honeywell Inc. | Integral flow sensor and channel assembly |
US4537068A (en) * | 1983-03-10 | 1985-08-27 | Dwyer Instruments, Inc. | Thermal anemometer |
DE3485381D1 (de) * | 1983-05-18 | 1992-02-06 | Bronkhorst High Tech Bv | Durchflussmessgeraet. |
JPS601525A (ja) * | 1983-06-20 | 1985-01-07 | Nippon Soken Inc | 半導体式流量検出装置 |
JPS6013220A (ja) * | 1983-07-04 | 1985-01-23 | Esutetsuku:Kk | ガス流量センサ−及びその製造方法 |
US4966037A (en) * | 1983-09-12 | 1990-10-30 | Honeywell Inc. | Cantilever semiconductor device |
EP0134859A1 (en) * | 1983-09-21 | 1985-03-27 | Honeywell Inc. | Fluid flow sensors |
US4633578A (en) * | 1983-12-01 | 1987-01-06 | Aine Harry E | Miniature thermal fluid flow sensors and batch methods of making same |
US4566320A (en) * | 1984-05-07 | 1986-01-28 | Honeywell, Inc. | Fluid flow sensing means with ambient temperature compensation |
US4576050A (en) * | 1984-08-29 | 1986-03-18 | General Motors Corporation | Thermal diffusion fluid flow sensor |
EP0176996B1 (en) * | 1984-10-01 | 1991-06-05 | Honeywell Inc. | Semiconductor device, in particular semiconductor sensor and method for its fabrication |
US4672997A (en) * | 1984-10-29 | 1987-06-16 | Btu Engineering Corporation | Modular, self-diagnostic mass-flow controller and system |
JPS61170618A (ja) * | 1985-01-24 | 1986-08-01 | Toyota Central Res & Dev Lab Inc | 流速検出用半導体センサ |
JPS61178614A (ja) * | 1985-02-02 | 1986-08-11 | Nippon Soken Inc | 直熱型流量センサ |
DE3604202C2 (de) * | 1985-02-14 | 1997-01-09 | Nippon Denso Co | Direkt beheizte Strömungsmeßvorrichtung |
JPS61188901A (ja) * | 1985-02-16 | 1986-08-22 | 株式会社日本自動車部品総合研究所 | 流量センサ用膜式抵抗 |
JPS61274222A (ja) * | 1985-05-30 | 1986-12-04 | Sharp Corp | 流量センサ |
GB2179748B (en) * | 1985-08-20 | 1989-09-06 | Sharp Kk | Thermal flow sensor |
DE3606851A1 (de) * | 1986-03-03 | 1987-09-10 | Vdo Schindling | Anordnung zur messung der stroemungsgeschwindigkeit |
JPH0810231B2 (ja) * | 1987-03-31 | 1996-01-31 | シャープ株式会社 | フローセンサ |
JPS63307315A (ja) * | 1987-06-09 | 1988-12-15 | Hitachi Ltd | ホツトフイルム形空気流量計 |
FR2620820B1 (fr) * | 1987-09-22 | 1992-06-19 | Degussa | Resistance electrique chauffante pour rheometre |
US4888988A (en) * | 1987-12-23 | 1989-12-26 | Siemens-Bendix Automotive Electronics L.P. | Silicon based mass airflow sensor and its fabrication method |
EP0341323B2 (de) * | 1988-05-07 | 1995-11-15 | Honeywell B.V. | Regeleinrichtung für Gasbrenner |
DE3843746C1 (ja) * | 1988-12-24 | 1990-07-12 | Degussa Ag, 6000 Frankfurt, De | |
DE8900142U1 (de) * | 1989-01-07 | 1990-05-10 | Robert Bosch Gmbh, 7000 Stuttgart | Träger für Sensoren |
US5205170A (en) * | 1991-04-01 | 1993-04-27 | Ford Motor Company | Mass flow sensor |
JPH06249693A (ja) * | 1993-02-25 | 1994-09-09 | Robert Bosch Gmbh | 質量流量センサおよびその製造方法 |
JP3240733B2 (ja) * | 1993-03-17 | 2001-12-25 | 株式会社日立製作所 | 熱式空気流量計 |
WO1995023338A1 (de) * | 1994-02-28 | 1995-08-31 | Heraeus Sensor Gmbh | Sensoranordnung für heissfilmanemometer |
JP2880651B2 (ja) * | 1994-08-12 | 1999-04-12 | 東京瓦斯株式会社 | 熱式マイクロフローセンサ及びその製造方法 |
DE19527861B4 (de) * | 1995-07-29 | 2010-09-30 | Robert Bosch Gmbh | Massenflusssensor sowie Verfahren zur Herstellung |
DE19530413C1 (de) * | 1995-08-18 | 1997-04-03 | Heraeus Sensor Gmbh | Verfahren zur Befestigung und Kontaktierung von Widerstandselementen für Heißfilmanemometer sowie Sensoranordnung |
DE19847303B4 (de) * | 1998-10-14 | 2006-11-30 | Robert Bosch Gmbh | Sensorelement mit antiadhäsiver Oberflächenbeschichtung |
GB9904428D0 (en) * | 1999-02-26 | 1999-04-21 | Delphi Tech Inc | Mass flow sensor with ambient sensor |
US6631638B2 (en) | 2001-01-30 | 2003-10-14 | Rosemount Aerospace Inc. | Fluid flow sensor |
US6732422B1 (en) * | 2002-01-04 | 2004-05-11 | Taiwan Semiconductor Manufacturing Company | Method of forming resistors |
US6684695B1 (en) | 2002-10-08 | 2004-02-03 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Mass flow sensor utilizing a resistance bridge |
EP1960744A2 (en) | 2005-12-02 | 2008-08-27 | Melexis NV | Thermal mass flow meter |
US7755466B2 (en) | 2006-04-26 | 2010-07-13 | Honeywell International Inc. | Flip-chip flow sensor |
DE102007041109B4 (de) * | 2007-08-30 | 2009-07-09 | Continental Automotive Gmbh | Fluidmassenmesser |
EP2131168A1 (en) | 2008-06-04 | 2009-12-09 | Siemens Aktiengesellschaft | Method and device for detecting capacity changes in a fluid and turbine |
RU2456551C1 (ru) * | 2011-03-30 | 2012-07-20 | Открытое акционерное общество "Авангард" | Датчик контроля уровня жидкости |
US10107662B2 (en) | 2015-01-30 | 2018-10-23 | Honeywell International Inc. | Sensor assembly |
RU2736233C1 (ru) * | 2020-02-10 | 2020-11-12 | Открытое акционерное общество "Авангард" | Тонкопленочный титановый терморезистор на гибкой полиимидной подложке и способ его изготовления |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB839615A (en) * | 1958-07-28 | 1960-06-29 | Godart Mijnhardt N V | Improvements in or relating to a device for measuring the velocity of a gas or the concentration of a gas in a gas mixture |
US3352154A (en) * | 1965-06-16 | 1967-11-14 | Robert S Djorup | Heated element fluid flow sensor |
US3498127A (en) * | 1966-06-09 | 1970-03-03 | Albert M Richards | Measuring fluid flow |
US3748174A (en) * | 1968-12-30 | 1973-07-24 | Gen Electric | Thin film nickel temperature sensor |
DE1904029A1 (de) * | 1969-01-28 | 1970-08-06 | Mueller Dipl Ing W K | Thermisches Volumenstrommessverfahren fuer Fluessigkeiten und Gase |
CH510873A (de) * | 1969-07-08 | 1971-07-31 | Mettler Instrumente Ag | Elektrisches Widerstandsthermometer |
US3931736A (en) * | 1974-06-28 | 1976-01-13 | Rca Corporation | Improved fluid flow sensor configuration |
US3991613A (en) * | 1975-03-10 | 1976-11-16 | Corning Glass Works | Sensing element for flow meter |
US3996799A (en) * | 1975-09-29 | 1976-12-14 | Putten Antonius Ferdinandus Pe | Device for measuring the flow velocity of a medium |
-
1979
- 1979-06-27 DE DE19792925975 patent/DE2925975A1/de not_active Ceased
-
1980
- 1980-04-24 US US06/143,352 patent/US4320655A/en not_active Expired - Lifetime
- 1980-06-13 EP EP80103324A patent/EP0021291A1/de not_active Ceased
- 1980-06-23 JP JP8502380A patent/JPS567018A/ja active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58160488U (ja) * | 1982-04-21 | 1983-10-26 | 株式会社芝浦電子製作所 | セラミツクヒ−タ・センサ |
JPH0239356Y2 (ja) * | 1982-04-21 | 1990-10-22 | ||
US4735099A (en) * | 1984-05-09 | 1988-04-05 | Nippon Soken, Inc. | Direct-heated gas-flow measuring apparatus |
JPS6140513A (ja) * | 1984-08-01 | 1986-02-26 | Hitachi Ltd | 薄膜抵抗式空気流量検出装置及び薄膜抵抗式計測素子 |
JPH0566527B2 (ja) * | 1984-08-01 | 1993-09-22 | Hitachi Ltd |
Also Published As
Publication number | Publication date |
---|---|
EP0021291A1 (de) | 1981-01-07 |
US4320655A (en) | 1982-03-23 |
DE2925975A1 (de) | 1981-01-15 |
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