JPS5669832A - Two step type wafer prematching system for optically matching and exposing machine - Google Patents

Two step type wafer prematching system for optically matching and exposing machine

Info

Publication number
JPS5669832A
JPS5669832A JP14810180A JP14810180A JPS5669832A JP S5669832 A JPS5669832 A JP S5669832A JP 14810180 A JP14810180 A JP 14810180A JP 14810180 A JP14810180 A JP 14810180A JP S5669832 A JPS5669832 A JP S5669832A
Authority
JP
Japan
Prior art keywords
prematching
step type
type wafer
exposing machine
optically matching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14810180A
Other languages
English (en)
Inventor
Eichi Fuiritsupusu Edowaado
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Optimetrix Corp
Original Assignee
Optimetrix Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Optimetrix Corp filed Critical Optimetrix Corp
Publication of JPS5669832A publication Critical patent/JPS5669832A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
    • G03F9/7007—Alignment other than original with workpiece
    • G03F9/7011—Pre-exposure scan; original with original holder alignment; Prealignment, i.e. workpiece with workpiece holder

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP14810180A 1979-10-22 1980-10-22 Two step type wafer prematching system for optically matching and exposing machine Pending JPS5669832A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/087,220 US4345836A (en) 1979-10-22 1979-10-22 Two-stage wafer prealignment system for an optical alignment and exposure machine

Publications (1)

Publication Number Publication Date
JPS5669832A true JPS5669832A (en) 1981-06-11

Family

ID=22203822

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14810180A Pending JPS5669832A (en) 1979-10-22 1980-10-22 Two step type wafer prematching system for optically matching and exposing machine

Country Status (6)

Country Link
US (1) US4345836A (ja)
EP (1) EP0027570B1 (ja)
JP (1) JPS5669832A (ja)
CA (1) CA1171974A (ja)
DE (1) DE3071324D1 (ja)
IE (1) IE51060B1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010203961A (ja) * 2009-03-04 2010-09-16 Mitsubishi Electric Plant Engineering Corp 電圧警報器

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57117238A (en) * 1981-01-14 1982-07-21 Nippon Kogaku Kk <Nikon> Exposing and baking device for manufacturing integrated circuit with illuminometer
JPS582018A (ja) * 1981-06-26 1983-01-07 Toshiba Corp ウエハ及び半導体装置の製造方法
US4431304A (en) * 1981-11-25 1984-02-14 Mayer Herbert E Apparatus for the projection copying of mask patterns on a workpiece
EP0098984A1 (en) * 1982-06-18 1984-01-25 Eaton-Optimetrix Inc. Step-and-repeat projection alignment and exposure system
NL8204450A (nl) * 1982-11-17 1984-06-18 Philips Nv Verplaatsingsinrichting, in het bijzonder voor het stralingslithografisch behandelen van een substraat.
NL8300220A (nl) * 1983-01-21 1984-08-16 Philips Nv Inrichting voor het stralingslithografisch behandelen van een dun substraat.
JPS59154023A (ja) * 1983-02-22 1984-09-03 Nippon Kogaku Kk <Nikon> 板状体の姿勢制御装置
US4655584A (en) * 1984-05-11 1987-04-07 Nippon Kogaku K. K. Substrate positioning apparatus
US4676649A (en) * 1985-11-27 1987-06-30 Compact Spindle Bearing Corp. Multi-axis gas bearing stage assembly
US4881100A (en) * 1985-12-10 1989-11-14 Canon Kabushiki Kaisha Alignment method
US4662754A (en) * 1985-12-20 1987-05-05 The Perkin-Elmer Corporation Method for facilitating the alignment of a photomask with individual fields on the surfaces of a number of wafers
WO1988005205A1 (en) * 1986-12-29 1988-07-14 Hughes Aircraft Company X-y--z positioning stage
US4891526A (en) * 1986-12-29 1990-01-02 Hughes Aircraft Company X-Y-θ-Z positioning stage
US5217550A (en) * 1990-09-28 1993-06-08 Dai Nippon Printing Co., Ltd Alignment transfer method
JP2919158B2 (ja) * 1992-02-10 1999-07-12 キヤノン株式会社 基板保持装置
US5497060A (en) * 1993-06-21 1996-03-05 Juergens, Iii; Albert M. Positioning stage
US6188467B1 (en) * 1997-06-13 2001-02-13 Canon Kabushiki Kaisha Method and apparatus for fabricating semiconductor devices
US6114705A (en) * 1997-09-10 2000-09-05 Varian Semiconductor Equipment Associates, Inc. System for correcting eccentricity and rotational error of a workpiece
US6217034B1 (en) 1998-09-24 2001-04-17 Kla-Tencor Corporation Edge handling wafer chuck
US6228705B1 (en) 1999-02-03 2001-05-08 International Business Machines Corporation Overlay process for fabricating a semiconductor device
US6357996B2 (en) * 1999-05-14 2002-03-19 Newport Corporation Edge gripping specimen prealigner
US6162008A (en) * 1999-06-08 2000-12-19 Varian Semiconductor Equipment Associates, Inc. Wafer orientation sensor
JP2001060544A (ja) 1999-08-20 2001-03-06 Oki Electric Ind Co Ltd 被処理体の位置合わせ方法及び被処理体の位置合わせシステム
JP4942129B2 (ja) 2000-04-07 2012-05-30 バリアン・セミコンダクター・エクイップメント・アソシエイツ・インコーポレイテッド ＧａＡｓウエハ用のウエハ方向センサー
DE10144876B4 (de) * 2001-09-12 2004-03-04 Robert Bosch Gmbh Belichtungsmaskeneinrichtung und Verfahren zur Ausrichtung einer Vielzahl von Substraten auf eine Belichtungsmaske
DE102007049098A1 (de) * 2007-10-11 2009-04-16 Vistec Semiconductor Systems Gmbh Verfahren und Einrichtung zum lagerichtigen Ablegen eines Substrat in einer Koordinaten-Messmaschine
US9190310B2 (en) * 2010-04-16 2015-11-17 Lam Research Ag Grounded chuck
CN103034072B (zh) * 2012-12-20 2015-01-21 志圣科技（广州）有限公司 待曝光基材及底片的对位方法及影像检测对位系统

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3984186A (en) * 1969-02-27 1976-10-05 Canon Kabushiki Kaisha Projection masking system
US3709378A (en) * 1971-03-04 1973-01-09 Ibm Aligning and orienting apparatus
US3902615A (en) * 1973-03-12 1975-09-02 Computervision Corp Automatic wafer loading and pre-alignment system
US3865254A (en) * 1973-05-21 1975-02-11 Kasker Instr Inc Prealignment system for an optical alignment and exposure instrument
FR2388300A1 (fr) * 1977-04-20 1978-11-17 Thomson Csf Dispositif optique de projection de motifs comportant un asservissement de focalisation a grandissement constant
US4200395A (en) * 1977-05-03 1980-04-29 Massachusetts Institute Of Technology Alignment of diffraction gratings
JPS5485679A (en) * 1977-12-20 1979-07-07 Canon Inc Wafer aligning unit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010203961A (ja) * 2009-03-04 2010-09-16 Mitsubishi Electric Plant Engineering Corp 電圧警報器

Also Published As

Publication number Publication date
DE3071324D1 (en) 1986-02-13
EP0027570B1 (en) 1986-01-02
IE51060B1 (en) 1986-09-17
US4345836A (en) 1982-08-24
EP0027570A2 (en) 1981-04-29
EP0027570A3 (en) 1981-11-18
IE802181L (en) 1981-04-22
CA1171974A (en) 1984-07-31

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