JPS5668686A - Manufacture of dimethylaminosilane - Google Patents

Manufacture of dimethylaminosilane

Info

Publication number
JPS5668686A
JPS5668686A JP10838180A JP10838180A JPS5668686A JP S5668686 A JPS5668686 A JP S5668686A JP 10838180 A JP10838180 A JP 10838180A JP 10838180 A JP10838180 A JP 10838180A JP S5668686 A JPS5668686 A JP S5668686A
Authority
JP
Japan
Prior art keywords
dimethylaminosilane
manufacture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10838180A
Other languages
English (en)
Other versions
JPS6111957B2 (ja
Inventor
Buruusu Haadoru Uiriamu
Kannaa Baanaado
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Union Carbide Corp
Original Assignee
Union Carbide Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Union Carbide Corp filed Critical Union Carbide Corp
Publication of JPS5668686A publication Critical patent/JPS5668686A/ja
Publication of JPS6111957B2 publication Critical patent/JPS6111957B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
    • C07F7/02—Silicon compounds
    • C07F7/08—Compounds having one or more C—Si linkages
    • C07F7/10—Compounds having one or more C—Si linkages containing nitrogen having a Si-N linkage
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
    • C07F7/02—Silicon compounds
    • C07F7/025—Silicon compounds without C-silicon linkages

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
JP10838180A 1979-10-24 1980-08-08 Manufacture of dimethylaminosilane Granted JPS5668686A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/087,797 US4255348A (en) 1979-10-24 1979-10-24 Preparation of dimethylaminosilanes

Publications (2)

Publication Number Publication Date
JPS5668686A true JPS5668686A (en) 1981-06-09
JPS6111957B2 JPS6111957B2 (ja) 1986-04-05

Family

ID=22207319

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10838180A Granted JPS5668686A (en) 1979-10-24 1980-08-08 Manufacture of dimethylaminosilane

Country Status (5)

Country Link
US (1) US4255348A (ja)
EP (1) EP0028057B1 (ja)
JP (1) JPS5668686A (ja)
CA (1) CA1154031A (ja)
DE (1) DE3061037D1 (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02503908A (ja) * 1988-04-04 1990-11-15 アメリカ合衆国 元素状ケイ素と有機アミンとの直接反応によってケイ素、水素、窒素および炭素を含有する有機生成物を製造する方法およびこの方法によって得られた生成物
KR20170005305A (ko) 2015-07-03 2017-01-12 주식회사 덕산유엠티 트리스(알킬아미노)실란의 제조 방법
WO2018163517A1 (ja) 2017-03-10 2018-09-13 Jnc株式会社 ジアルキルアミノシランの製造方法
US10150785B2 (en) 2015-03-24 2018-12-11 Jnc Corporation Method for producing dialkylaminosilane

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4400526A (en) * 1982-09-30 1983-08-23 Union Carbide Corporation Hydrogen bearing silyl carbamates
US4789564A (en) * 1987-03-31 1988-12-06 Union Carbide Corporation Hydridoaminosilane treatment for rendering surfaces water-repellent
DE3832933A1 (de) * 1988-09-28 1990-03-29 Wacker Chemie Gmbh Verfahren zur herstellung von polysilazanen
US5529935A (en) * 1995-05-17 1996-06-25 Hemlock Semiconductor Corporation Method for determining organoamines concentrations in chlorosilane
CN117143141B (zh) * 2023-10-30 2024-01-12 江苏南大光电材料股份有限公司 一种三（二甲胺基）硅烷的制备方法及制备系统

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2380996A (en) * 1941-09-26 1945-08-07 Gen Electric Preparation of organosilicon halides
US2380999A (en) * 1942-03-04 1945-08-07 Gen Electric Preparation of organosilicon halides
US2483373A (en) * 1946-04-16 1949-09-27 Gen Electric Preparation of hydrocarbon-substituted halogenosilanes
US2887501A (en) * 1956-12-26 1959-05-19 Gen Electric Preparation of higher alkylated alkyl halogenosilanes
DE1239687B (de) * 1965-03-12 1967-05-03 Goldschmidt Ag Th Verfahren zur Herstellung metallorganischer Verbindungen
US3467686A (en) * 1967-10-03 1969-09-16 Union Carbide Corp Preparation of organosilicon-nitrogen compounds
US3951710A (en) * 1974-09-13 1976-04-20 International Business Machines Corporation Method for removing copper contaminant from semiconductor surfaces
US4088669A (en) * 1977-04-08 1978-05-09 Dow Corning Corporation Method for preparing organosilicon compounds from elemental silicon and hydrocarbon ethers

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02503908A (ja) * 1988-04-04 1990-11-15 アメリカ合衆国 元素状ケイ素と有機アミンとの直接反応によってケイ素、水素、窒素および炭素を含有する有機生成物を製造する方法およびこの方法によって得られた生成物
US10150785B2 (en) 2015-03-24 2018-12-11 Jnc Corporation Method for producing dialkylaminosilane
KR20170005305A (ko) 2015-07-03 2017-01-12 주식회사 덕산유엠티 트리스(알킬아미노)실란의 제조 방법
WO2018163517A1 (ja) 2017-03-10 2018-09-13 Jnc株式会社 ジアルキルアミノシランの製造方法
KR20190126774A (ko) 2017-03-10 2019-11-12 제이엔씨 주식회사 디알킬아미노실란의 제조 방법
US11028108B2 (en) 2017-03-10 2021-06-08 Jnc Corporation Method for producing dialkylaminosilane

Also Published As

Publication number Publication date
EP0028057A1 (en) 1981-05-06
DE3061037D1 (en) 1982-12-09
JPS6111957B2 (ja) 1986-04-05
EP0028057B1 (en) 1982-11-03
US4255348A (en) 1981-03-10
CA1154031A (en) 1983-09-20

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