JPS566666A - Linear motor - Google Patents

Linear motor

Info

Publication number
JPS566666A
JPS566666A JP8142779A JP8142779A JPS566666A JP S566666 A JPS566666 A JP S566666A JP 8142779 A JP8142779 A JP 8142779A JP 8142779 A JP8142779 A JP 8142779A JP S566666 A JPS566666 A JP S566666A
Authority
JP
Grant status
Application
Patent type
Prior art keywords
magnetic
pole
armature
made
core
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8142779A
Other versions
JPS5857066B2 (en )
Inventor
Masami Iwasaki
Kazumi Matsui
Masaki Oda
Takashi Takasue
Original Assignee
Furukawa Electric Co Ltd:The
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K41/00Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02Linear motors; Sectional motors
    • H02K41/03Synchronous motors; Motors moving step by step; Reluctance motors

Abstract

PURPOSE:To obtain simultaneously a driving power, a floating power and a guiding power in the width direction to enable the stable driving of a linear motor by a method wherein plural magnetic poles are prepared in an armature and a magnetic field system extending in parallel in the axial direction confronting with each other, and each magnetic pole is so controlled as to constitutes a magnetic single-pole. CONSTITUTION:An armature core 15 is constituted of a core having an E-shaped sectional area, and forms three lines of magnetic poles 15a-15c extending in the axial direction. Slots 18 having equal space with each other are prepared in the center magnetic pole line 15b, and four armature coils 11-14 are equipped in the slot 18 piled up in two layers, each coil being made to bridge over two poles of center magnetic pole line 15b and to be shifted by half pitch. Currents are made to flow in the armature coils 11-14 being so controlled as each of the magnetic pole line 15a-15c forms a magnetic single-pole respectively. A field system 20 is also constituted of a core having an equal sectional area, and each line of magnetic pole 21a-21c is made to constitute respectively a magnetic single-pole by a magnetic field coil 23, and the field system is made to confront with an armature 10.
JP8142779A 1979-06-29 1979-06-29 Expired JPS5857066B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8142779A JPS5857066B2 (en) 1979-06-29 1979-06-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8142779A JPS5857066B2 (en) 1979-06-29 1979-06-29

Publications (2)

Publication Number Publication Date
JPS566666A true true JPS566666A (en) 1981-01-23
JPS5857066B2 JPS5857066B2 (en) 1983-12-17

Family

ID=13746062

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8142779A Expired JPS5857066B2 (en) 1979-06-29 1979-06-29

Country Status (1)

Country Link
JP (1) JPS5857066B2 (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006068233A1 (en) * 2004-12-24 2006-06-29 Nikon Corporation Magnetic guiding apparatus, stage apparatus, exposure apparatus and device manufacturing method
US7830046B2 (en) 2007-03-16 2010-11-09 Nikon Corporation Damper for a stage assembly
US8854601B2 (en) 2005-05-12 2014-10-07 Nikon Corporation Projection optical system, exposure apparatus, and exposure method
US9341954B2 (en) 2007-10-24 2016-05-17 Nikon Corporation Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method
US9423698B2 (en) 2003-10-28 2016-08-23 Nikon Corporation Illumination optical apparatus and projection exposure apparatus
US9678437B2 (en) 2003-04-09 2017-06-13 Nikon Corporation Illumination optical apparatus having distribution changing member to change light amount and polarization member to set polarization in circumference direction
US9885872B2 (en) 2003-11-20 2018-02-06 Nikon Corporation Illumination optical apparatus, exposure apparatus, and exposure method with optical integrator and polarization member that changes polarization state of light
US10007194B2 (en) 2004-02-06 2018-06-26 Nikon Corporation Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6149367A (en) * 1984-08-17 1986-03-11 Matsushita Electric Works Ltd Variable color discahrge lamp
JPH0454339B2 (en) * 1984-08-25 1992-08-31 Matsushita Electric Works Ltd
JPS6193970U (en) * 1984-11-24 1986-06-17
JPH0421308B2 (en) * 1984-11-24 1992-04-09 Matsushita Electric Works Ltd
JPS6193968U (en) * 1984-11-24 1986-06-17
JPS6193969U (en) * 1984-11-24 1986-06-17

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9885959B2 (en) 2003-04-09 2018-02-06 Nikon Corporation Illumination optical apparatus having deflecting member, lens, polarization member to set polarization in circumference direction, and optical integrator
US9678437B2 (en) 2003-04-09 2017-06-13 Nikon Corporation Illumination optical apparatus having distribution changing member to change light amount and polarization member to set polarization in circumference direction
US9423698B2 (en) 2003-10-28 2016-08-23 Nikon Corporation Illumination optical apparatus and projection exposure apparatus
US9760014B2 (en) 2003-10-28 2017-09-12 Nikon Corporation Illumination optical apparatus and projection exposure apparatus
US9885872B2 (en) 2003-11-20 2018-02-06 Nikon Corporation Illumination optical apparatus, exposure apparatus, and exposure method with optical integrator and polarization member that changes polarization state of light
US10007194B2 (en) 2004-02-06 2018-06-26 Nikon Corporation Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
WO2006068233A1 (en) * 2004-12-24 2006-06-29 Nikon Corporation Magnetic guiding apparatus, stage apparatus, exposure apparatus and device manufacturing method
US9360763B2 (en) 2005-05-12 2016-06-07 Nikon Corporation Projection optical system, exposure apparatus, and exposure method
US9429851B2 (en) 2005-05-12 2016-08-30 Nikon Corporation Projection optical system, exposure apparatus, and exposure method
US9310696B2 (en) 2005-05-12 2016-04-12 Nikon Corporation Projection optical system, exposure apparatus, and exposure method
US8854601B2 (en) 2005-05-12 2014-10-07 Nikon Corporation Projection optical system, exposure apparatus, and exposure method
US9891539B2 (en) 2005-05-12 2018-02-13 Nikon Corporation Projection optical system, exposure apparatus, and exposure method
US7830046B2 (en) 2007-03-16 2010-11-09 Nikon Corporation Damper for a stage assembly
US9857599B2 (en) 2007-10-24 2018-01-02 Nikon Corporation Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method
US9341954B2 (en) 2007-10-24 2016-05-17 Nikon Corporation Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method

Also Published As

Publication number Publication date Type
JP1224275C (en) grant
JPS5857066B2 (en) 1983-12-17 grant

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