JPS5663807A - Manufacture of silicon nitride powder - Google Patents

Manufacture of silicon nitride powder

Info

Publication number
JPS5663807A
JPS5663807A JP13887279A JP13887279A JPS5663807A JP S5663807 A JPS5663807 A JP S5663807A JP 13887279 A JP13887279 A JP 13887279A JP 13887279 A JP13887279 A JP 13887279A JP S5663807 A JPS5663807 A JP S5663807A
Authority
JP
Japan
Prior art keywords
powder
aggregate
gas
manufacture
silicon nitride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13887279A
Other languages
Japanese (ja)
Other versions
JPS6110403B2 (en
Inventor
Hideyuki Masaki
Nobuo Kamiya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Central R&D Labs Inc
Original Assignee
Toyota Central R&D Labs Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Central R&D Labs Inc filed Critical Toyota Central R&D Labs Inc
Priority to JP13887279A priority Critical patent/JPS5663807A/en
Publication of JPS5663807A publication Critical patent/JPS5663807A/en
Publication of JPS6110403B2 publication Critical patent/JPS6110403B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B21/00—Nitrogen; Compounds thereof
    • C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
    • C01B21/068—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon
    • C01B21/0682—Preparation by direct nitridation of silicon

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Products (AREA)

Abstract

PURPOSE: To manufacture α-type Si3N4 powder contg. little Si2N2O by coating an Si powder aggregate to be nitrided with powder of Al4C3, AlN or the like, gradually feeding a nitriding gas into the aggregate through the coated body, and heating the aggregate.
CONSTITUTION: An aggregate of Si powder or mixed powder consisting essentially of Si power is filled into a crucible made of Si3N4 or other material. After coating the surface of the aggregate with a powder layer of Al4C3, AlN or the like the aggregate is heated in a furnace while gradually feeding a nitriding gas into the Si powder through the powder layer. This nitriding treatment is carried out in H2 gas or a vacuum at 1,200W1,400, preferably 1,250W1,350°C. As the nitriding gas a cracked gas such as N2 gas or NH3 is suitably used. The resulting α-type Si3N4 powder of high purity is sintered together with MgO as a sintering accelerator to obtain a silicon nitride sintered body with very high strength at high temp.
COPYRIGHT: (C)1981,JPO&Japio
JP13887279A 1979-10-26 1979-10-26 Manufacture of silicon nitride powder Granted JPS5663807A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13887279A JPS5663807A (en) 1979-10-26 1979-10-26 Manufacture of silicon nitride powder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13887279A JPS5663807A (en) 1979-10-26 1979-10-26 Manufacture of silicon nitride powder

Publications (2)

Publication Number Publication Date
JPS5663807A true JPS5663807A (en) 1981-05-30
JPS6110403B2 JPS6110403B2 (en) 1986-03-29

Family

ID=15232076

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13887279A Granted JPS5663807A (en) 1979-10-26 1979-10-26 Manufacture of silicon nitride powder

Country Status (1)

Country Link
JP (1) JPS5663807A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5888107A (en) * 1981-11-16 1983-05-26 Denki Kagaku Kogyo Kk Continuous preparation of alpha-type silicon nitride
CN111364104A (en) * 2020-04-23 2020-07-03 哈尔滨科友半导体产业装备与技术研究院有限公司 Preparation method of high-purity raw material for aluminum nitride single crystal growth

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63254348A (en) * 1987-04-10 1988-10-21 Asahi Glass Co Ltd Fluid heating device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5888107A (en) * 1981-11-16 1983-05-26 Denki Kagaku Kogyo Kk Continuous preparation of alpha-type silicon nitride
JPH028964B2 (en) * 1981-11-16 1990-02-28 Denki Kagaku Kogyo Kk
CN111364104A (en) * 2020-04-23 2020-07-03 哈尔滨科友半导体产业装备与技术研究院有限公司 Preparation method of high-purity raw material for aluminum nitride single crystal growth

Also Published As

Publication number Publication date
JPS6110403B2 (en) 1986-03-29

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