JPS56501509A - - Google Patents
Info
- Publication number
- JPS56501509A JPS56501509A JP50015780A JP50015780A JPS56501509A JP S56501509 A JPS56501509 A JP S56501509A JP 50015780 A JP50015780 A JP 50015780A JP 50015780 A JP50015780 A JP 50015780A JP S56501509 A JPS56501509 A JP S56501509A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/637—Lateral IGFETs having no inversion channels, e.g. buried channel lateral IGFETs, normally-on lateral IGFETs or depletion-mode lateral IGFETs
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D64/00—Electrodes of devices having potential barriers
- H10D64/01—Manufacture or treatment
- H10D64/031—Manufacture or treatment of data-storage electrodes
- H10D64/035—Manufacture or treatment of data-storage electrodes comprising conductor-insulator-conductor-insulator-semiconductor structures
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/01—Manufacture or treatment
- H10D84/0123—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs
- H10D84/0126—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs
- H10D84/0135—Manufacturing their gate conductors
- H10D84/0142—Manufacturing their gate conductors the gate conductors having different shapes or dimensions
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/01—Manufacture or treatment
- H10D84/0123—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs
- H10D84/0126—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs
- H10D84/0144—Manufacturing their gate insulating layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/01—Manufacture or treatment
- H10D84/02—Manufacture or treatment characterised by using material-based technologies
- H10D84/03—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
- H10D84/038—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology using silicon technology, e.g. SiGe
Landscapes
- Insulated Gate Type Field-Effect Transistor (AREA)
- Measuring Magnetic Variables (AREA)
- Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US9412179A | 1979-11-14 | 1979-11-14 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS56501509A true JPS56501509A (enrdf_load_stackoverflow) | 1981-10-15 |
Family
ID=22243186
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50015780A Pending JPS56501509A (enrdf_load_stackoverflow) | 1979-11-14 | 1980-11-12 |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP0039736A4 (enrdf_load_stackoverflow) |
JP (1) | JPS56501509A (enrdf_load_stackoverflow) |
WO (1) | WO1981001485A1 (enrdf_load_stackoverflow) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5049520A (en) * | 1990-06-06 | 1991-09-17 | Micron Technology, Inc. | Method of partially eliminating the bird's beak effect without adding any process steps |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1390135A (en) * | 1971-05-08 | 1975-04-09 | Matsushita Electric Ind Co Ltd | Insulated gate semiconductor device |
JPS5222480A (en) * | 1975-08-14 | 1977-02-19 | Nippon Telegr & Teleph Corp <Ntt> | Insulating gate field effect transistor |
US4033026A (en) * | 1975-12-16 | 1977-07-05 | Intel Corporation | High density/high speed MOS process and device |
GB1575741A (en) * | 1977-01-17 | 1980-09-24 | Philips Electronic Associated | Integrated circuits |
DE2911726C2 (de) * | 1978-03-27 | 1985-08-01 | Ncr Corp., Dayton, Ohio | Verfahren zur Herstellung eines Feldeffekttransistors |
US4212683A (en) * | 1978-03-27 | 1980-07-15 | Ncr Corporation | Method for making narrow channel FET |
US4229755A (en) * | 1978-08-15 | 1980-10-21 | Rockwell International Corporation | Fabrication of very large scale integrated circuits containing N-channel silicon gate nonvolatile memory elements |
-
1980
- 1980-11-12 JP JP50015780A patent/JPS56501509A/ja active Pending
- 1980-11-12 EP EP19800902383 patent/EP0039736A4/en not_active Ceased
- 1980-11-12 WO PCT/US1980/001523 patent/WO1981001485A1/en not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
EP0039736A4 (en) | 1983-04-06 |
WO1981001485A1 (en) | 1981-05-28 |
EP0039736A1 (en) | 1981-11-18 |