JPS5644906A - Control anomaly detecting device - Google Patents
Control anomaly detecting deviceInfo
- Publication number
- JPS5644906A JPS5644906A JP11922579A JP11922579A JPS5644906A JP S5644906 A JPS5644906 A JP S5644906A JP 11922579 A JP11922579 A JP 11922579A JP 11922579 A JP11922579 A JP 11922579A JP S5644906 A JPS5644906 A JP S5644906A
- Authority
- JP
- Japan
- Prior art keywords
- value
- appreciation
- decided
- exceeds
- reference value
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing And Monitoring For Control Systems (AREA)
Abstract
PURPOSE:To make it possible to decide whether following is good or not in respect to vibratory response also, by integrating the absolute value of deviation when deviation exceeds a prescribed range and by using the integral value as the appreciation value for anomaly detection. CONSTITUTION:Deviation (c) between target value (a) and state quantity (b) is obtained by operator 1 and is input to absolute value operator 5 to obtain the absolute value. It is decided through comparator 6 whether the absolute value exceeds the detection reference value or not. If it exceeds this detection reference value, integrator 4 is operated; and if the state where it does not exceed the detection reference value continues for a prescribed time, integrator 4 is reset. The output of integrator 4 is input to comparator 2 as appreciation value (f), and it is decided whether it exceeds the appreciation reference value or not. If it excceds the appreciation reference value, control is decided as abnormal; and if not, control is decided as normal.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11922579A JPS5644906A (en) | 1979-09-19 | 1979-09-19 | Control anomaly detecting device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11922579A JPS5644906A (en) | 1979-09-19 | 1979-09-19 | Control anomaly detecting device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5644906A true JPS5644906A (en) | 1981-04-24 |
Family
ID=14756047
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11922579A Pending JPS5644906A (en) | 1979-09-19 | 1979-09-19 | Control anomaly detecting device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5644906A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10488754B2 (en) | 2017-01-31 | 2019-11-26 | Toshiba Memory Corporation | Imprint apparatus and manufacturing method of semiconductor device |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5467177A (en) * | 1977-11-08 | 1979-05-30 | Toshiba Corp | Failure detector of adjustment and control system |
-
1979
- 1979-09-19 JP JP11922579A patent/JPS5644906A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5467177A (en) * | 1977-11-08 | 1979-05-30 | Toshiba Corp | Failure detector of adjustment and control system |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10488754B2 (en) | 2017-01-31 | 2019-11-26 | Toshiba Memory Corporation | Imprint apparatus and manufacturing method of semiconductor device |
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