JPS5644906A - Control anomaly detecting device - Google Patents

Control anomaly detecting device

Info

Publication number
JPS5644906A
JPS5644906A JP11922579A JP11922579A JPS5644906A JP S5644906 A JPS5644906 A JP S5644906A JP 11922579 A JP11922579 A JP 11922579A JP 11922579 A JP11922579 A JP 11922579A JP S5644906 A JPS5644906 A JP S5644906A
Authority
JP
Japan
Prior art keywords
value
appreciation
decided
exceeds
reference value
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11922579A
Other languages
Japanese (ja)
Inventor
Yoichi Tone
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP11922579A priority Critical patent/JPS5644906A/en
Publication of JPS5644906A publication Critical patent/JPS5644906A/en
Pending legal-status Critical Current

Links

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  • Testing And Monitoring For Control Systems (AREA)

Abstract

PURPOSE:To make it possible to decide whether following is good or not in respect to vibratory response also, by integrating the absolute value of deviation when deviation exceeds a prescribed range and by using the integral value as the appreciation value for anomaly detection. CONSTITUTION:Deviation (c) between target value (a) and state quantity (b) is obtained by operator 1 and is input to absolute value operator 5 to obtain the absolute value. It is decided through comparator 6 whether the absolute value exceeds the detection reference value or not. If it exceeds this detection reference value, integrator 4 is operated; and if the state where it does not exceed the detection reference value continues for a prescribed time, integrator 4 is reset. The output of integrator 4 is input to comparator 2 as appreciation value (f), and it is decided whether it exceeds the appreciation reference value or not. If it excceds the appreciation reference value, control is decided as abnormal; and if not, control is decided as normal.
JP11922579A 1979-09-19 1979-09-19 Control anomaly detecting device Pending JPS5644906A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11922579A JPS5644906A (en) 1979-09-19 1979-09-19 Control anomaly detecting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11922579A JPS5644906A (en) 1979-09-19 1979-09-19 Control anomaly detecting device

Publications (1)

Publication Number Publication Date
JPS5644906A true JPS5644906A (en) 1981-04-24

Family

ID=14756047

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11922579A Pending JPS5644906A (en) 1979-09-19 1979-09-19 Control anomaly detecting device

Country Status (1)

Country Link
JP (1) JPS5644906A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10488754B2 (en) 2017-01-31 2019-11-26 Toshiba Memory Corporation Imprint apparatus and manufacturing method of semiconductor device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5467177A (en) * 1977-11-08 1979-05-30 Toshiba Corp Failure detector of adjustment and control system

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5467177A (en) * 1977-11-08 1979-05-30 Toshiba Corp Failure detector of adjustment and control system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10488754B2 (en) 2017-01-31 2019-11-26 Toshiba Memory Corporation Imprint apparatus and manufacturing method of semiconductor device

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