JPS564247A - Wiring integrated at high degree - Google Patents
Wiring integrated at high degreeInfo
- Publication number
- JPS564247A JPS564247A JP7910879A JP7910879A JPS564247A JP S564247 A JPS564247 A JP S564247A JP 7910879 A JP7910879 A JP 7910879A JP 7910879 A JP7910879 A JP 7910879A JP S564247 A JPS564247 A JP S564247A
- Authority
- JP
- Japan
- Prior art keywords
- wiring region
- film
- width
- wiring
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE:To reduce the area of a wiring region, by increasing the thickness of a film on only the heavy current porton of the wiring region to increase the effective current density of unit width and decrease the layer resistance. CONSTITUTION:An Al film is selectively produced on only the heavy current portion 1 of a wiring region. Subsequently, another Al film is selectively provided on the entire wiring region so that the film thickness on the portion 1 is twice larger than that on the other portion. Therefore, the current capacity of the portion is twice higher than that of the other portion and the layer resistance of the former portion is reduced to a half and the wiring layer width of the former portion may be a half of that of the width of a single layer. This results in greatly reducing the area of the wiring region.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7910879A JPS564247A (en) | 1979-06-25 | 1979-06-25 | Wiring integrated at high degree |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7910879A JPS564247A (en) | 1979-06-25 | 1979-06-25 | Wiring integrated at high degree |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS564247A true JPS564247A (en) | 1981-01-17 |
Family
ID=13680698
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7910879A Pending JPS564247A (en) | 1979-06-25 | 1979-06-25 | Wiring integrated at high degree |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS564247A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63147120U (en) * | 1987-03-19 | 1988-09-28 | ||
JPH02102535A (en) * | 1988-10-12 | 1990-04-16 | Nec Corp | Semiconductor integrated circuit device |
-
1979
- 1979-06-25 JP JP7910879A patent/JPS564247A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63147120U (en) * | 1987-03-19 | 1988-09-28 | ||
JPH02102535A (en) * | 1988-10-12 | 1990-04-16 | Nec Corp | Semiconductor integrated circuit device |
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