JPS5641181B2 - - Google Patents
Info
- Publication number
- JPS5641181B2 JPS5641181B2 JP7117677A JP7117677A JPS5641181B2 JP S5641181 B2 JPS5641181 B2 JP S5641181B2 JP 7117677 A JP7117677 A JP 7117677A JP 7117677 A JP7117677 A JP 7117677A JP S5641181 B2 JPS5641181 B2 JP S5641181B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D18/00—Thyristors
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Thyristors (AREA)
- Bipolar Transistors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US05/698,480 US4099997A (en) | 1976-06-21 | 1976-06-21 | Method of fabricating a semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52156578A JPS52156578A (en) | 1977-12-27 |
| JPS5641181B2 true JPS5641181B2 (en:Method) | 1981-09-26 |
Family
ID=24805431
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7117677A Granted JPS52156578A (en) | 1976-06-21 | 1977-06-17 | Method of producing semiconductor device |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US4099997A (en:Method) |
| JP (1) | JPS52156578A (en:Method) |
| BE (1) | BE855889A (en:Method) |
| DE (1) | DE2726484A1 (en:Method) |
| FR (1) | FR2356272A1 (en:Method) |
| GB (1) | GB1575058A (en:Method) |
| IN (1) | IN146805B (en:Method) |
| IT (1) | IT1082080B (en:Method) |
| PL (1) | PL114729B1 (en:Method) |
| SE (1) | SE7706615L (en:Method) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4199386A (en) * | 1978-11-28 | 1980-04-22 | Rca Corporation | Method of diffusing aluminum into monocrystalline silicon |
| JPS5824007B2 (ja) * | 1979-07-16 | 1983-05-18 | 株式会社日立製作所 | 半導体装置の製造方法 |
| US4804634A (en) * | 1981-04-24 | 1989-02-14 | National Semiconductor Corporation | Integrated circuit lateral transistor structure |
| DE19908400A1 (de) * | 1999-02-26 | 2000-09-07 | Bosch Gmbh Robert | Verfahren zur Herstellung hochdotierter Halbleiterbauelemente |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3313012A (en) * | 1963-11-13 | 1967-04-11 | Texas Instruments Inc | Method for making a pnpn device by diffusing |
| GB1068392A (en) * | 1965-05-05 | 1967-05-10 | Lucas Industries Ltd | Semi-conductor devices |
| US3523042A (en) * | 1967-12-26 | 1970-08-04 | Hughes Aircraft Co | Method of making bipolar transistor devices |
| GB1199399A (en) * | 1968-06-21 | 1970-07-22 | Matsushita Electronics Corp | Improvements in or relating to the Manufacture of Semiconductors. |
| NL140657B (nl) * | 1968-06-21 | 1973-12-17 | Philips Nv | Werkwijze voor het vervaardigen van een halfgeleiderinrichting door een diffusiebehandeling en halfgeleiderinrichting, vervaardigd volgens deze werkwijze. |
| DE1811277C3 (de) * | 1968-11-27 | 1978-06-08 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Verfahren zum Herstellen von p-dotierten Zonen mit unterschiedlichen Eindringtiefen in einer n-Silicium-Schicht |
| US3748198A (en) * | 1970-01-22 | 1973-07-24 | Ibm | Simultaneous double diffusion into a semiconductor substrate |
| US3886569A (en) * | 1970-01-22 | 1975-05-27 | Ibm | Simultaneous double diffusion into a semiconductor substrate |
| FR2088067A1 (en) * | 1970-05-13 | 1972-01-07 | Tsitovsky Ilya | Semiconductor slice - with shaped p-n junctions |
| US3751314A (en) * | 1971-07-01 | 1973-08-07 | Bell Telephone Labor Inc | Silicon semiconductor device processing |
| DE2214224C3 (de) * | 1972-03-23 | 1978-05-03 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Verfahren zur Bildung von pn-Übergängen in III-V-Halbleiter-Einkristallen |
| US3901735A (en) * | 1973-09-10 | 1975-08-26 | Nat Semiconductor Corp | Integrated circuit device and method utilizing ion implanted and up diffusion for isolated region |
| FR2280974A1 (fr) * | 1974-08-01 | 1976-02-27 | Silec Semi Conducteurs | Procede de fabrication de semi-conducteurs comprenant au moins une couche dopee a l'aluminium et nouveaux produits ainsi obtenus |
| DE2506436C3 (de) * | 1975-02-15 | 1980-05-14 | Deutsche Itt Industries Gmbh, 7800 Freiburg | Diffusionsverfahren zum Herstellen aluminiumdotierter Isolationszonen für Halbleiterbauelemente |
| GB1536545A (en) * | 1975-03-26 | 1978-12-20 | Mullard Ltd | Semiconductor device manufacture |
-
1976
- 1976-06-21 US US05/698,480 patent/US4099997A/en not_active Expired - Lifetime
-
1977
- 1977-04-28 IN IN634/CAL/77A patent/IN146805B/en unknown
- 1977-05-19 IT IT23774/77A patent/IT1082080B/it active
- 1977-06-07 SE SE7706615A patent/SE7706615L/ not_active Application Discontinuation
- 1977-06-09 GB GB24125/77A patent/GB1575058A/en not_active Expired
- 1977-06-11 DE DE19772726484 patent/DE2726484A1/de not_active Withdrawn
- 1977-06-14 FR FR7718224A patent/FR2356272A1/fr active Pending
- 1977-06-17 JP JP7117677A patent/JPS52156578A/ja active Granted
- 1977-06-18 PL PL1977198972A patent/PL114729B1/pl unknown
- 1977-06-20 BE BE178599A patent/BE855889A/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52156578A (en) | 1977-12-27 |
| DE2726484A1 (de) | 1977-12-29 |
| SE7706615L (sv) | 1977-12-22 |
| PL198972A1 (pl) | 1978-01-30 |
| FR2356272A1 (fr) | 1978-01-20 |
| IN146805B (en:Method) | 1979-09-15 |
| BE855889A (fr) | 1977-10-17 |
| US4099997A (en) | 1978-07-11 |
| GB1575058A (en) | 1980-09-17 |
| PL114729B1 (en) | 1981-02-28 |
| IT1082080B (it) | 1985-05-21 |