JPS5640240A - Electron beam painting device - Google Patents
Electron beam painting deviceInfo
- Publication number
- JPS5640240A JPS5640240A JP11527479A JP11527479A JPS5640240A JP S5640240 A JPS5640240 A JP S5640240A JP 11527479 A JP11527479 A JP 11527479A JP 11527479 A JP11527479 A JP 11527479A JP S5640240 A JPS5640240 A JP S5640240A
- Authority
- JP
- Japan
- Prior art keywords
- electron beams
- boards
- electron
- deflected
- blanking
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/3002—Details
- H01J37/3007—Electron or ion-optical systems
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/045—Beam blanking or chopping, i.e. arrangements for momentarily interrupting exposure to the discharge
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11527479A JPS5640240A (en) | 1979-09-10 | 1979-09-10 | Electron beam painting device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11527479A JPS5640240A (en) | 1979-09-10 | 1979-09-10 | Electron beam painting device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5640240A true JPS5640240A (en) | 1981-04-16 |
JPS6113374B2 JPS6113374B2 (th) | 1986-04-12 |
Family
ID=14658596
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11527479A Granted JPS5640240A (en) | 1979-09-10 | 1979-09-10 | Electron beam painting device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5640240A (th) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6452150U (th) * | 1987-09-29 | 1989-03-30 |
-
1979
- 1979-09-10 JP JP11527479A patent/JPS5640240A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6113374B2 (th) | 1986-04-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5640240A (en) | Electron beam painting device | |
JPS5774948A (en) | Electron gun | |
JPS5239366A (en) | Electronic gun device | |
JPS5698827A (en) | Electron beam exposure device | |
GB908590A (en) | Charged particle gun | |
JPS5494092A (en) | Mass analyzer | |
JPS52150688A (en) | Solid ion source | |
GB976664A (en) | Improvements in or relating to ion sources | |
JPS6455375A (en) | Device for projecting ion beam | |
JPS55117985A (en) | Ion beam quantity measuring unit | |
JPS5380128A (en) | Protection circuit | |
JPS5358769A (en) | Ion injector | |
JPS55159168A (en) | Low speed electron measuring apparatus | |
JPS53132396A (en) | Solid ion source | |
JPS5787054A (en) | Charged particle irradiation system | |
JPS5569941A (en) | Electron source for display unit | |
JPS5523454A (en) | Lead auger analyzer | |
JPS52128053A (en) | Electron microscope | |
JPS5565146A (en) | Characteristic measuring method for charge trap center in insulator | |
Held | COMPOSITION AND TEMPERATURE EFFECTS ON LOW FREQUENCY MICROFIELDS AND THEIR APPLICATIONS | |
JPS6445048A (en) | Mass spectrograph for secondary ion | |
JPS5324783A (en) | Breakdown voltage goodness or not analyzing method | |
JPS6443953A (en) | Electron gun structure for color picture tube | |
JPS5772073A (en) | Voltage measuring device | |
JPS56145647A (en) | Ion source for mass spectrometer |