JPS5324783A - Breakdown voltage goodness or not analyzing method - Google Patents

Breakdown voltage goodness or not analyzing method

Info

Publication number
JPS5324783A
JPS5324783A JP9872576A JP9872576A JPS5324783A JP S5324783 A JPS5324783 A JP S5324783A JP 9872576 A JP9872576 A JP 9872576A JP 9872576 A JP9872576 A JP 9872576A JP S5324783 A JPS5324783 A JP S5324783A
Authority
JP
Japan
Prior art keywords
goodness
breakdown voltage
analyzing method
voltage
bvced
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9872576A
Other languages
Japanese (ja)
Inventor
Nobuyuki Nakamoto
Hideaki Uchida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9872576A priority Critical patent/JPS5324783A/en
Publication of JPS5324783A publication Critical patent/JPS5324783A/en
Pending legal-status Critical Current

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  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE: To assess the non-defective of BVEBO from whether the emitter electrode of Al-or Si-doped Al melts or not by disposing a wafer into electrolyte and applying the voltage of BVCED <V<BVCBO with Pt as a cathode.
COPYRIGHT: (C)1978,JPO&Japio
JP9872576A 1976-08-20 1976-08-20 Breakdown voltage goodness or not analyzing method Pending JPS5324783A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9872576A JPS5324783A (en) 1976-08-20 1976-08-20 Breakdown voltage goodness or not analyzing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9872576A JPS5324783A (en) 1976-08-20 1976-08-20 Breakdown voltage goodness or not analyzing method

Publications (1)

Publication Number Publication Date
JPS5324783A true JPS5324783A (en) 1978-03-07

Family

ID=14227487

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9872576A Pending JPS5324783A (en) 1976-08-20 1976-08-20 Breakdown voltage goodness or not analyzing method

Country Status (1)

Country Link
JP (1) JPS5324783A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5887819A (en) * 1981-11-20 1983-05-25 Hitachi Ltd Inspection apparatus for mask pattern defect

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3379625A (en) * 1964-03-30 1968-04-23 Gen Electric Semiconductor testing

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3379625A (en) * 1964-03-30 1968-04-23 Gen Electric Semiconductor testing

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5887819A (en) * 1981-11-20 1983-05-25 Hitachi Ltd Inspection apparatus for mask pattern defect

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