JPS5324783A - Breakdown voltage goodness or not analyzing method - Google Patents
Breakdown voltage goodness or not analyzing methodInfo
- Publication number
- JPS5324783A JPS5324783A JP9872576A JP9872576A JPS5324783A JP S5324783 A JPS5324783 A JP S5324783A JP 9872576 A JP9872576 A JP 9872576A JP 9872576 A JP9872576 A JP 9872576A JP S5324783 A JPS5324783 A JP S5324783A
- Authority
- JP
- Japan
- Prior art keywords
- goodness
- breakdown voltage
- analyzing method
- voltage
- bvced
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE: To assess the non-defective of BVEBO from whether the emitter electrode of Al-or Si-doped Al melts or not by disposing a wafer into electrolyte and applying the voltage of BVCED <V<BVCBO with Pt as a cathode.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9872576A JPS5324783A (en) | 1976-08-20 | 1976-08-20 | Breakdown voltage goodness or not analyzing method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9872576A JPS5324783A (en) | 1976-08-20 | 1976-08-20 | Breakdown voltage goodness or not analyzing method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5324783A true JPS5324783A (en) | 1978-03-07 |
Family
ID=14227487
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9872576A Pending JPS5324783A (en) | 1976-08-20 | 1976-08-20 | Breakdown voltage goodness or not analyzing method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5324783A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5887819A (en) * | 1981-11-20 | 1983-05-25 | Hitachi Ltd | Inspection apparatus for mask pattern defect |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3379625A (en) * | 1964-03-30 | 1968-04-23 | Gen Electric | Semiconductor testing |
-
1976
- 1976-08-20 JP JP9872576A patent/JPS5324783A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3379625A (en) * | 1964-03-30 | 1968-04-23 | Gen Electric | Semiconductor testing |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5887819A (en) * | 1981-11-20 | 1983-05-25 | Hitachi Ltd | Inspection apparatus for mask pattern defect |
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