JPS5637829A - Manufacture of magnetic recording medium - Google Patents

Manufacture of magnetic recording medium

Info

Publication number
JPS5637829A
JPS5637829A JP11193779A JP11193779A JPS5637829A JP S5637829 A JPS5637829 A JP S5637829A JP 11193779 A JP11193779 A JP 11193779A JP 11193779 A JP11193779 A JP 11193779A JP S5637829 A JPS5637829 A JP S5637829A
Authority
JP
Japan
Prior art keywords
base
vapor
coercive force
angle
roll
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11193779A
Other languages
Japanese (ja)
Other versions
JPS6161445B2 (en
Inventor
Saburo Ishibashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Corp
Original Assignee
TDK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TDK Corp filed Critical TDK Corp
Priority to JP11193779A priority Critical patent/JPS5637829A/en
Publication of JPS5637829A publication Critical patent/JPS5637829A/en
Publication of JPS6161445B2 publication Critical patent/JPS6161445B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/225—Oblique incidence of vaporised material on substrate
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation

Abstract

PURPOSE:To obtain a high output with excellent linearity from the short-wave range to the long-wave range by varying an angle contained between a vapor flow and base normal line from a low angle to a high angle in step when vapor-depositing a ferromagnetic material on the base while moving a nonmagnetic base. CONSTITUTION:In the method of vapor-depositing ferromagnetic material 4 slantingly on filmlike base 5 by vaporing it by vapor generator 3 while evacuating vacuum tank 1 to fixed extent through exhauster 2, run guides 81-83 are provided between supply reel 6 and take-up roll 7 and three angles between straight-line planes and vertical planes formed between guides 81-83 and the roll are so set that theta1>theta2> theta3. A thus obtained magnetic thin film has relatively low coercive force at the lower and relatively high coercive force at the upper and has high coercive force on the whole. Consequently, a high output and excellent frequency characteristics can be obtained and the film growth speed and sticking efficiency improve.
JP11193779A 1979-09-01 1979-09-01 Manufacture of magnetic recording medium Granted JPS5637829A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11193779A JPS5637829A (en) 1979-09-01 1979-09-01 Manufacture of magnetic recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11193779A JPS5637829A (en) 1979-09-01 1979-09-01 Manufacture of magnetic recording medium

Publications (2)

Publication Number Publication Date
JPS5637829A true JPS5637829A (en) 1981-04-11
JPS6161445B2 JPS6161445B2 (en) 1986-12-25

Family

ID=14573867

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11193779A Granted JPS5637829A (en) 1979-09-01 1979-09-01 Manufacture of magnetic recording medium

Country Status (1)

Country Link
JP (1) JPS5637829A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS581452A (en) * 1981-03-04 1983-01-06 マ−パ・ゲ−エムベ−ハ−・グンミ−ウント−プラステイ−クベルケ Pacifier

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS581452A (en) * 1981-03-04 1983-01-06 マ−パ・ゲ−エムベ−ハ−・グンミ−ウント−プラステイ−クベルケ Pacifier
JPH0215219B2 (en) * 1981-03-04 1990-04-11 Maapaa Gmbh Gunmii Unto Purasuteiikuberuke

Also Published As

Publication number Publication date
JPS6161445B2 (en) 1986-12-25

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