JPS5633002A - Evaporation apparatus of thin film with sealing rotor - Google Patents

Evaporation apparatus of thin film with sealing rotor

Info

Publication number
JPS5633002A
JPS5633002A JP10917379A JP10917379A JPS5633002A JP S5633002 A JPS5633002 A JP S5633002A JP 10917379 A JP10917379 A JP 10917379A JP 10917379 A JP10917379 A JP 10917379A JP S5633002 A JPS5633002 A JP S5633002A
Authority
JP
Japan
Prior art keywords
content
blade
rotor
foamy
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10917379A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5752841B2 (enExample
Inventor
Chikao Oda
Ryoji Fukuyama
Morihisa Maruko
Yuji Fujii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10917379A priority Critical patent/JPS5633002A/ja
Publication of JPS5633002A publication Critical patent/JPS5633002A/ja
Publication of JPS5752841B2 publication Critical patent/JPS5752841B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D1/00—Evaporating
    • B01D1/22—Evaporating by bringing a thin layer of the liquid into contact with a heated surface
    • B01D1/222—In rotating vessels; vessels with movable parts
    • B01D1/223—In rotating vessels; vessels with movable parts containing a rotor
    • B01D1/225—In rotating vessels; vessels with movable parts containing a rotor with blades or scrapers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
JP10917379A 1979-08-29 1979-08-29 Evaporation apparatus of thin film with sealing rotor Granted JPS5633002A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10917379A JPS5633002A (en) 1979-08-29 1979-08-29 Evaporation apparatus of thin film with sealing rotor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10917379A JPS5633002A (en) 1979-08-29 1979-08-29 Evaporation apparatus of thin film with sealing rotor

Publications (2)

Publication Number Publication Date
JPS5633002A true JPS5633002A (en) 1981-04-03
JPS5752841B2 JPS5752841B2 (enExample) 1982-11-10

Family

ID=14503499

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10917379A Granted JPS5633002A (en) 1979-08-29 1979-08-29 Evaporation apparatus of thin film with sealing rotor

Country Status (1)

Country Link
JP (1) JPS5633002A (enExample)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5615802A (en) * 1979-07-10 1981-02-16 Luwa Ag Method and device for thermally treating fluid material

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5615802A (en) * 1979-07-10 1981-02-16 Luwa Ag Method and device for thermally treating fluid material

Also Published As

Publication number Publication date
JPS5752841B2 (enExample) 1982-11-10

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