JPS5632741A - Apparatus for evaluating crystal - Google Patents

Apparatus for evaluating crystal

Info

Publication number
JPS5632741A
JPS5632741A JP10895079A JP10895079A JPS5632741A JP S5632741 A JPS5632741 A JP S5632741A JP 10895079 A JP10895079 A JP 10895079A JP 10895079 A JP10895079 A JP 10895079A JP S5632741 A JPS5632741 A JP S5632741A
Authority
JP
Japan
Prior art keywords
light
frequency
measured
response
lights
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10895079A
Other languages
Japanese (ja)
Inventor
Masashi Ozeki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP10895079A priority Critical patent/JPS5632741A/en
Publication of JPS5632741A publication Critical patent/JPS5632741A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Abstract

PURPOSE:To simultaneously measure the intensity ratio of signals of frequency fn to be measured and of reference frequency f0 in high accuracy by introducing an exciting modulated light having in frequency band the frequency fn and the reference frequency f0 used as the reference of the amplitude thereof into an apparatus for evaluating a crystal and analyzing the frequency of the corresponding response signal. CONSTITUTION:A light from a gas laser light source is modulated by a light modulator M, the light L1 is introduced into a material S, and the response ligth L2 is photoelectrically converted by a photoelectric converter D. The light is amplified by an amplifier A, is then branched by a branching unit T through filters F0, F1 for passing only the lights of frequencies f0, and fn, and the intensity ratio of the lights are measured in amplitude by a vector voltmeter V. Since the response light to the incident light of the frequency to be measured is measured and compared with the response light of the reference incident light at the same time according to this configuration, the dispersion of the frequency of the response light may be measured in high accuracy for extremely short time.
JP10895079A 1979-08-27 1979-08-27 Apparatus for evaluating crystal Pending JPS5632741A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10895079A JPS5632741A (en) 1979-08-27 1979-08-27 Apparatus for evaluating crystal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10895079A JPS5632741A (en) 1979-08-27 1979-08-27 Apparatus for evaluating crystal

Publications (1)

Publication Number Publication Date
JPS5632741A true JPS5632741A (en) 1981-04-02

Family

ID=14497749

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10895079A Pending JPS5632741A (en) 1979-08-27 1979-08-27 Apparatus for evaluating crystal

Country Status (1)

Country Link
JP (1) JPS5632741A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103913690A (en) * 2014-04-04 2014-07-09 中国科学院微电子研究所 Method and system for measuring frequency dispersion characteristic of transistor output resistance

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103913690A (en) * 2014-04-04 2014-07-09 中国科学院微电子研究所 Method and system for measuring frequency dispersion characteristic of transistor output resistance

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