JPS5631297B2 - - Google Patents
Info
- Publication number
- JPS5631297B2 JPS5631297B2 JP5996573A JP5996573A JPS5631297B2 JP S5631297 B2 JPS5631297 B2 JP S5631297B2 JP 5996573 A JP5996573 A JP 5996573A JP 5996573 A JP5996573 A JP 5996573A JP S5631297 B2 JPS5631297 B2 JP S5631297B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Curing Cements, Concrete, And Artificial Stone (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5996573A JPS5631297B2 (fr) | 1973-05-29 | 1973-05-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5996573A JPS5631297B2 (fr) | 1973-05-29 | 1973-05-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS509629A JPS509629A (fr) | 1975-01-31 |
| JPS5631297B2 true JPS5631297B2 (fr) | 1981-07-20 |
Family
ID=13128377
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5996573A Expired JPS5631297B2 (fr) | 1973-05-29 | 1973-05-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5631297B2 (fr) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4400409A (en) * | 1980-05-19 | 1983-08-23 | Energy Conversion Devices, Inc. | Method of making p-doped silicon films |
| JPS56153727A (en) * | 1981-04-15 | 1981-11-27 | Shunpei Yamazaki | Manufacture of semiconductor device |
| JPS583223A (ja) * | 1981-06-30 | 1983-01-10 | Toshiba Corp | 半導体装置の製造方法 |
| JPS5825225A (ja) * | 1981-08-07 | 1983-02-15 | Mitsubishi Electric Corp | ホツトウオ−ル形減圧装置 |
| JPS5958820A (ja) * | 1982-09-28 | 1984-04-04 | Matsushita Electronics Corp | 気相エピタキシヤル成長装置 |
| JPS6010681A (ja) * | 1983-06-30 | 1985-01-19 | Canon Inc | 光電変換部材の製造装置 |
| JPS61294811A (ja) * | 1985-06-21 | 1986-12-25 | Nippon Telegr & Teleph Corp <Ntt> | 半導体結晶製造装置 |
| JPS6366923A (ja) * | 1987-03-20 | 1988-03-25 | Shunpei Yamazaki | 連続式半導体被膜形成装置 |
| JPS6366922A (ja) * | 1987-03-20 | 1988-03-25 | Shunpei Yamazaki | 半導体装置作製方法 |
| JPH05121339A (ja) * | 1992-03-26 | 1993-05-18 | Semiconductor Energy Lab Co Ltd | 被膜作製装置 |
-
1973
- 1973-05-29 JP JP5996573A patent/JPS5631297B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS509629A (fr) | 1975-01-31 |