JPS5627117A - Light splitter - Google Patents

Light splitter

Info

Publication number
JPS5627117A
JPS5627117A JP10249179A JP10249179A JPS5627117A JP S5627117 A JPS5627117 A JP S5627117A JP 10249179 A JP10249179 A JP 10249179A JP 10249179 A JP10249179 A JP 10249179A JP S5627117 A JPS5627117 A JP S5627117A
Authority
JP
Japan
Prior art keywords
face
photodetector
glass plate
exit end
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10249179A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6337366B2 (cs
Inventor
Tetsushi Nose
Kiyonobu Endo
Kazuya Matsumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP10249179A priority Critical patent/JPS5627117A/ja
Publication of JPS5627117A publication Critical patent/JPS5627117A/ja
Publication of JPS6337366B2 publication Critical patent/JPS6337366B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure Control For Cameras (AREA)
  • Optical Elements Other Than Lenses (AREA)
JP10249179A 1979-08-10 1979-08-10 Light splitter Granted JPS5627117A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10249179A JPS5627117A (en) 1979-08-10 1979-08-10 Light splitter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10249179A JPS5627117A (en) 1979-08-10 1979-08-10 Light splitter

Publications (2)

Publication Number Publication Date
JPS5627117A true JPS5627117A (en) 1981-03-16
JPS6337366B2 JPS6337366B2 (cs) 1988-07-25

Family

ID=14328885

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10249179A Granted JPS5627117A (en) 1979-08-10 1979-08-10 Light splitter

Country Status (1)

Country Link
JP (1) JPS5627117A (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS597333A (ja) * 1982-07-05 1984-01-14 Ricoh Co Ltd 光走査方法
EP1780770A4 (en) * 2004-06-18 2008-02-27 Nikon Corp LIGHT DETECTION DEVICE, OPTICAL LIGHTING DEVICE, EXPOSURE DEVICE AND EXPOSURE METHOD

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS597333A (ja) * 1982-07-05 1984-01-14 Ricoh Co Ltd 光走査方法
EP1780770A4 (en) * 2004-06-18 2008-02-27 Nikon Corp LIGHT DETECTION DEVICE, OPTICAL LIGHTING DEVICE, EXPOSURE DEVICE AND EXPOSURE METHOD
JPWO2005124831A1 (ja) * 2004-06-18 2008-04-17 株式会社ニコン 光検出装置、照明光学装置、露光装置、および露光方法
US7573019B2 (en) 2004-06-18 2009-08-11 Nikon Corporation Light detecting apparatus, illumination optical apparatus, exposure apparatus and exposure method
JP4730712B2 (ja) * 2004-06-18 2011-07-20 株式会社ニコン 照明光学装置、露光装置、および露光方法

Also Published As

Publication number Publication date
JPS6337366B2 (cs) 1988-07-25

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