JPS5622951B2 - - Google Patents
Info
- Publication number
- JPS5622951B2 JPS5622951B2 JP6159875A JP6159875A JPS5622951B2 JP S5622951 B2 JPS5622951 B2 JP S5622951B2 JP 6159875 A JP6159875 A JP 6159875A JP 6159875 A JP6159875 A JP 6159875A JP S5622951 B2 JPS5622951 B2 JP S5622951B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6159875A JPS51137681A (en) | 1975-05-23 | 1975-05-23 | Sputtering apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6159875A JPS51137681A (en) | 1975-05-23 | 1975-05-23 | Sputtering apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51137681A JPS51137681A (en) | 1976-11-27 |
| JPS5622951B2 true JPS5622951B2 (de) | 1981-05-28 |
Family
ID=13175739
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6159875A Granted JPS51137681A (en) | 1975-05-23 | 1975-05-23 | Sputtering apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS51137681A (de) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53132482A (en) * | 1977-04-26 | 1978-11-18 | Ulvac Corp | High gain sputtering evaporation apparatus consuming material to be evaporated uniformly |
| JPS5861461U (ja) * | 1981-10-19 | 1983-04-25 | 富士通株式会社 | スパツタリング装置 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5023382A (de) * | 1973-07-05 | 1975-03-13 | ||
| JPS50109185A (de) * | 1974-01-31 | 1975-08-28 | ||
| JPS50140381A (de) * | 1974-04-30 | 1975-11-11 |
-
1975
- 1975-05-23 JP JP6159875A patent/JPS51137681A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5023382A (de) * | 1973-07-05 | 1975-03-13 | ||
| JPS50109185A (de) * | 1974-01-31 | 1975-08-28 | ||
| JPS50140381A (de) * | 1974-04-30 | 1975-11-11 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS51137681A (en) | 1976-11-27 |