JPS5622908A - Automatic pattern check unit - Google Patents

Automatic pattern check unit

Info

Publication number
JPS5622908A
JPS5622908A JP9899879A JP9899879A JPS5622908A JP S5622908 A JPS5622908 A JP S5622908A JP 9899879 A JP9899879 A JP 9899879A JP 9899879 A JP9899879 A JP 9899879A JP S5622908 A JPS5622908 A JP S5622908A
Authority
JP
Japan
Prior art keywords
signal
checked
camera
input
frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9899879A
Other languages
English (en)
Inventor
Hisao Goto
Yuzaburo Mori
Toshihito Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daihen Corp
Original Assignee
Daihen Corp
Osaka Transformer Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daihen Corp, Osaka Transformer Co Ltd filed Critical Daihen Corp
Priority to JP9899879A priority Critical patent/JPS5622908A/ja
Publication of JPS5622908A publication Critical patent/JPS5622908A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Image Input (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP9899879A 1979-08-02 1979-08-02 Automatic pattern check unit Pending JPS5622908A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9899879A JPS5622908A (en) 1979-08-02 1979-08-02 Automatic pattern check unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9899879A JPS5622908A (en) 1979-08-02 1979-08-02 Automatic pattern check unit

Publications (1)

Publication Number Publication Date
JPS5622908A true JPS5622908A (en) 1981-03-04

Family

ID=14234634

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9899879A Pending JPS5622908A (en) 1979-08-02 1979-08-02 Automatic pattern check unit

Country Status (1)

Country Link
JP (1) JPS5622908A (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6168507A (ja) * 1984-09-12 1986-04-08 Amada Co Ltd 板材の形状検査装置
JPS61283855A (ja) * 1985-06-10 1986-12-13 Omron Tateisi Electronics Co 欠点検出装置
JPS6243505A (ja) * 1985-08-21 1987-02-25 Hitachi Ltd 半導体ウエハ上の被検査パターンの欠陥検査方法およびその装置
JPS62221085A (ja) * 1986-03-20 1987-09-29 Nec Corp 自己走査型光電変換検出装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS502962A (ja) * 1973-05-09 1975-01-13
JPS5381181A (en) * 1976-12-06 1978-07-18 Mitsubishi Rayon Co Inspecting method and apparatus for running flat articles
JPS5557103A (en) * 1978-10-20 1980-04-26 Nec Corp Picture measuring device for mobile object

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS502962A (ja) * 1973-05-09 1975-01-13
JPS5381181A (en) * 1976-12-06 1978-07-18 Mitsubishi Rayon Co Inspecting method and apparatus for running flat articles
JPS5557103A (en) * 1978-10-20 1980-04-26 Nec Corp Picture measuring device for mobile object

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6168507A (ja) * 1984-09-12 1986-04-08 Amada Co Ltd 板材の形状検査装置
JPS61283855A (ja) * 1985-06-10 1986-12-13 Omron Tateisi Electronics Co 欠点検出装置
JPS6243505A (ja) * 1985-08-21 1987-02-25 Hitachi Ltd 半導体ウエハ上の被検査パターンの欠陥検査方法およびその装置
JPS62221085A (ja) * 1986-03-20 1987-09-29 Nec Corp 自己走査型光電変換検出装置

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