JPS5622611A - Manufacture of alpha-type silicon nitride powder - Google Patents
Manufacture of alpha-type silicon nitride powderInfo
- Publication number
- JPS5622611A JPS5622611A JP9630679A JP9630679A JPS5622611A JP S5622611 A JPS5622611 A JP S5622611A JP 9630679 A JP9630679 A JP 9630679A JP 9630679 A JP9630679 A JP 9630679A JP S5622611 A JPS5622611 A JP S5622611A
- Authority
- JP
- Japan
- Prior art keywords
- powder
- gas stream
- grain size
- mixed
- predetermined
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000843 powder Substances 0.000 title abstract 4
- 229910052581 Si3N4 Inorganic materials 0.000 title abstract 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 title abstract 2
- 238000004519 manufacturing process Methods 0.000 title 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 4
- 239000007789 gas Substances 0.000 abstract 4
- 239000008187 granular material Substances 0.000 abstract 3
- 229910052799 carbon Inorganic materials 0.000 abstract 2
- 238000010438 heat treatment Methods 0.000 abstract 2
- 239000011812 mixed powder Substances 0.000 abstract 2
- 239000000377 silicon dioxide Substances 0.000 abstract 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 1
- 239000011810 insulating material Substances 0.000 abstract 1
- 229910052760 oxygen Inorganic materials 0.000 abstract 1
- 239000001301 oxygen Substances 0.000 abstract 1
- 239000007858 starting material Substances 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
- C01B21/068—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon
- C01B21/0685—Preparation by carboreductive nitridation
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Ceramic Products (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9630679A JPS5622611A (en) | 1979-07-28 | 1979-07-28 | Manufacture of alpha-type silicon nitride powder |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9630679A JPS5622611A (en) | 1979-07-28 | 1979-07-28 | Manufacture of alpha-type silicon nitride powder |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5622611A true JPS5622611A (en) | 1981-03-03 |
| JPS6324924B2 JPS6324924B2 (enrdf_load_stackoverflow) | 1988-05-23 |
Family
ID=14161338
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9630679A Granted JPS5622611A (en) | 1979-07-28 | 1979-07-28 | Manufacture of alpha-type silicon nitride powder |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5622611A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5891012A (ja) * | 1981-11-25 | 1983-05-30 | Toshiba Ceramics Co Ltd | 窒化珪素粉末の製造方法及びその製造装置 |
| US4784839A (en) * | 1986-04-03 | 1988-11-15 | Atochem | Method of making metal carbide and nitride powders |
| US5525556A (en) * | 1994-04-14 | 1996-06-11 | The Dow Chemical Company | Silicon nitride/silicon carbide composite powders |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49122500A (enrdf_load_stackoverflow) * | 1973-03-27 | 1974-11-22 |
-
1979
- 1979-07-28 JP JP9630679A patent/JPS5622611A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49122500A (enrdf_load_stackoverflow) * | 1973-03-27 | 1974-11-22 |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5891012A (ja) * | 1981-11-25 | 1983-05-30 | Toshiba Ceramics Co Ltd | 窒化珪素粉末の製造方法及びその製造装置 |
| US4784839A (en) * | 1986-04-03 | 1988-11-15 | Atochem | Method of making metal carbide and nitride powders |
| US5525556A (en) * | 1994-04-14 | 1996-06-11 | The Dow Chemical Company | Silicon nitride/silicon carbide composite powders |
| US5538675A (en) * | 1994-04-14 | 1996-07-23 | The Dow Chemical Company | Method for producing silicon nitride/silicon carbide composite |
| US5643843A (en) * | 1994-04-14 | 1997-07-01 | The Dow Chemical Company | Silicon nitride/silicon carbide composite densified materials prepared using composite powders |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6324924B2 (enrdf_load_stackoverflow) | 1988-05-23 |
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