JPS5621334A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5621334A
JPS5621334A JP9766279A JP9766279A JPS5621334A JP S5621334 A JPS5621334 A JP S5621334A JP 9766279 A JP9766279 A JP 9766279A JP 9766279 A JP9766279 A JP 9766279A JP S5621334 A JPS5621334 A JP S5621334A
Authority
JP
Japan
Prior art keywords
film
source
layer
drain
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9766279A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6125212B2 (enrdf_load_stackoverflow
Inventor
Takashi Ito
Takao Nozaki
Hajime Ishikawa
Masaichi Shinoda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP9766279A priority Critical patent/JPS5621334A/ja
Publication of JPS5621334A publication Critical patent/JPS5621334A/ja
Publication of JPS6125212B2 publication Critical patent/JPS6125212B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)
JP9766279A 1979-07-31 1979-07-31 Manufacture of semiconductor device Granted JPS5621334A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9766279A JPS5621334A (en) 1979-07-31 1979-07-31 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9766279A JPS5621334A (en) 1979-07-31 1979-07-31 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5621334A true JPS5621334A (en) 1981-02-27
JPS6125212B2 JPS6125212B2 (enrdf_load_stackoverflow) 1986-06-14

Family

ID=14198265

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9766279A Granted JPS5621334A (en) 1979-07-31 1979-07-31 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5621334A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6125212B2 (enrdf_load_stackoverflow) 1986-06-14

Similar Documents

Publication Publication Date Title
JPS6410644A (en) Manufacture of semiconductor device
JPS55153377A (en) Production of semiconductor device
JPS5736842A (en) Semiconductor integrated circuit device
JPS5795625A (en) Manufacture of semiconductor device
JPS5621334A (en) Manufacture of semiconductor device
JPS5583267A (en) Method of fabricating semiconductor device
JPS54130883A (en) Production of semiconductor device
JPS57204146A (en) Manufacture of semiconductor device
JPS5483778A (en) Mos semiconductor device and its manufacture
JPS554964A (en) Manufacture of mos type semiconductor
JPS54153583A (en) Semiconductor device
JPS6428962A (en) Semiconductor device and manufacture thereof
JPS5559778A (en) Method of fabricating semiconductor device
JPS52124860A (en) Electrode formation method for semiconductor devices
JPS5522879A (en) Insulation gate type field effect semiconductor device
JPS57204145A (en) Manufacture of semiconductor device
JPS568849A (en) Manufacture of semiconductor integrated circuit
JPS55162270A (en) Semiconductor device
JPS55108772A (en) Semiconductor integrated circuit device
JPS5718362A (en) Semiconductor device and manufacture thereof
JPS5685853A (en) Manufacture of semiconductor device
JPS6468965A (en) Manufacture of semiconductor device
JPS55108749A (en) Manufacturing method of semiconductor device
JPS5492070A (en) Mis field effect transistor and its manufacture
JPS54155784A (en) Manufacture of semiconductor integrated-circuit device