JPS56163262A - Method and apparatus for forming oxidation and weather resistant film after surface treatment - Google Patents
Method and apparatus for forming oxidation and weather resistant film after surface treatmentInfo
- Publication number
- JPS56163262A JPS56163262A JP6639780A JP6639780A JPS56163262A JP S56163262 A JPS56163262 A JP S56163262A JP 6639780 A JP6639780 A JP 6639780A JP 6639780 A JP6639780 A JP 6639780A JP S56163262 A JPS56163262 A JP S56163262A
- Authority
- JP
- Japan
- Prior art keywords
- film
- chamber
- vacuum
- vacuum chamber
- low voltage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5826—Treatment with charged particles
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5846—Reactive treatment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/02—Pretreatment of the material to be coated
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6639780A JPS56163262A (en) | 1980-05-21 | 1980-05-21 | Method and apparatus for forming oxidation and weather resistant film after surface treatment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6639780A JPS56163262A (en) | 1980-05-21 | 1980-05-21 | Method and apparatus for forming oxidation and weather resistant film after surface treatment |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17034184A Division JPS60194060A (ja) | 1984-08-17 | 1984-08-17 | 表面処理後の耐酸化耐候性被膜の形成装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS56163262A true JPS56163262A (en) | 1981-12-15 |
JPS641548B2 JPS641548B2 (ja) | 1989-01-11 |
Family
ID=13314629
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6639780A Granted JPS56163262A (en) | 1980-05-21 | 1980-05-21 | Method and apparatus for forming oxidation and weather resistant film after surface treatment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56163262A (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0082654A1 (en) * | 1981-12-19 | 1983-06-29 | General Engineering Radcliffe 1979 Limited | Apparatus for and a method of coating a length of material |
JPH0499166A (ja) * | 1990-08-03 | 1992-03-31 | Matsushita Electric Ind Co Ltd | 両面蒸着フィルムの製造方法 |
EP0818557A1 (fr) * | 1996-07-12 | 1998-01-14 | RECHERCHE ET DEVELOPPEMENT DU GROUPE COCKERILL SAMBRE, en abrégé: RD-CS | Procédé et installation pour la formation d'un revêtement sur un substrat |
GB2529649A (en) * | 2014-08-27 | 2016-03-02 | Bobst Manchester Ltd | Vacuum coaters and methods of operating a vacuum coater |
-
1980
- 1980-05-21 JP JP6639780A patent/JPS56163262A/ja active Granted
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0082654A1 (en) * | 1981-12-19 | 1983-06-29 | General Engineering Radcliffe 1979 Limited | Apparatus for and a method of coating a length of material |
JPH0499166A (ja) * | 1990-08-03 | 1992-03-31 | Matsushita Electric Ind Co Ltd | 両面蒸着フィルムの製造方法 |
EP0818557A1 (fr) * | 1996-07-12 | 1998-01-14 | RECHERCHE ET DEVELOPPEMENT DU GROUPE COCKERILL SAMBRE, en abrégé: RD-CS | Procédé et installation pour la formation d'un revêtement sur un substrat |
BE1010420A3 (fr) * | 1996-07-12 | 1998-07-07 | Cockerill Rech & Dev | Procede pour la formation d'un revetement sur un substrat et installation pour la mise en oeuvre de ce procede. |
GB2529649A (en) * | 2014-08-27 | 2016-03-02 | Bobst Manchester Ltd | Vacuum coaters and methods of operating a vacuum coater |
GB2529649B (en) * | 2014-08-27 | 2016-07-27 | Bobst Manchester Ltd | Vacuum coaters and methods of operating a vacuum coater |
Also Published As
Publication number | Publication date |
---|---|
JPS641548B2 (ja) | 1989-01-11 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US3326177A (en) | Metal vapor coating apparatus | |
RU2001106185A (ru) | Способ активации поверхностей ленточных материалов | |
US4474827A (en) | Ion induced thin surface coating | |
JPS56163262A (en) | Method and apparatus for forming oxidation and weather resistant film after surface treatment | |
EP0555518B1 (de) | Verfahren für die Behandlung einer Oxidschicht | |
ES8707630A1 (es) | Perfeccionamientos introducidos en un aparato adaptado para depositar un material semiconductor en un substrato | |
US3616383A (en) | Method of ionitriding objects made of high-alloyed particularly stainless iron and steel | |
JPS5457477A (en) | Throw away tip of coated tool steel | |
JPS56156760A (en) | Method and apparatus for forming coat | |
GB732891A (en) | Improvements in and relating to the production of thin layers of chemical compounds on surfaces | |
US20020054468A1 (en) | Electrodes for electrolytic capacitors and production process thereof | |
JPS5745339A (en) | Production of deposited film | |
JPS6431958A (en) | Method for allowing thin metallic film to adhere to plastic film | |
DE2919191A1 (de) | Verfahren zum aufbringen einer beschichtung aus abriebfestem material auf rohre, insbesondere schreibroehrchen fuer roehrchenschreiber | |
JPS5785972A (en) | Thin film former | |
JPS63259070A (ja) | 金属酸化物薄膜作成方法 | |
JPS5655564A (en) | Method of forming hard cladding layer on the surface of member for cutting tool | |
EP1045409A2 (en) | Electrodes for electrolytic capacitors and production process thereof | |
EP0032709A3 (en) | Apparatus and method for the (patterned) coating of a substrate by cathodic sputtering and use thereof | |
SU901352A1 (ru) | Устройство дл нанесени покрытий | |
KR880001037A (ko) | 복수 챔버 침전 시스템 | |
JPH0372069A (ja) | 化合物の金属帯への連続蒸着法 | |
GB966664A (en) | Coating process | |
JPS57135836A (en) | Glow discharge treatment | |
JPS63475A (ja) | ハイブリツドイオンプレ−テイング装置 |