JPS56162282A - Cryopump - Google Patents
CryopumpInfo
- Publication number
- JPS56162282A JPS56162282A JP6540080A JP6540080A JPS56162282A JP S56162282 A JPS56162282 A JP S56162282A JP 6540080 A JP6540080 A JP 6540080A JP 6540080 A JP6540080 A JP 6540080A JP S56162282 A JPS56162282 A JP S56162282A
- Authority
- JP
- Japan
- Prior art keywords
- passages
- gap
- cryopanel
- coolant
- air bubbles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
PURPOSE: To smoothen the flow of a coolant in a panel by allowing the gap between two plates to have a plurality of stages, forming passages continuing in the flowing direction of a coolant by using the largest gap portions and locally joining the two plates at the smallest gap portions.
CONSTITUTION: Inside a cryopanel 2, a plurality of passages 5 of a large gap and a plurality of passages 5a of a small gap and having local joints are formed continuously in the flowing direction. The coolant 12 containing quite a number of air bubbles which is supplied into the cryopanel 2 from an injection pipe 11 is divided to flow mainly through a plurality of passages 5 of a large gap, which continue in the flowing direction, and gathered in an upper fluid reservoir 13 after cooling the cryopanel 2. Through a vapor-liquid separator 14, only the gas component is returned to an external refrigerating liquifier (not shown) from a return pipe 15. In addition, the air bubbles generated in the passages 5a of a small gap are drawn into upward flows in the passages 5. Thereby, the air bubbles are discharged extremely smoothly.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6540080A JPS56162282A (en) | 1980-05-19 | 1980-05-19 | Cryopump |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6540080A JPS56162282A (en) | 1980-05-19 | 1980-05-19 | Cryopump |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS56162282A true JPS56162282A (en) | 1981-12-14 |
Family
ID=13285920
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6540080A Pending JPS56162282A (en) | 1980-05-19 | 1980-05-19 | Cryopump |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56162282A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58195082U (en) * | 1982-06-23 | 1983-12-24 | 三菱重工業株式会社 | cryopump |
-
1980
- 1980-05-19 JP JP6540080A patent/JPS56162282A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58195082U (en) * | 1982-06-23 | 1983-12-24 | 三菱重工業株式会社 | cryopump |
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