JPS56162282A - Cryopump - Google Patents

Cryopump

Info

Publication number
JPS56162282A
JPS56162282A JP6540080A JP6540080A JPS56162282A JP S56162282 A JPS56162282 A JP S56162282A JP 6540080 A JP6540080 A JP 6540080A JP 6540080 A JP6540080 A JP 6540080A JP S56162282 A JPS56162282 A JP S56162282A
Authority
JP
Japan
Prior art keywords
passages
gap
cryopanel
coolant
air bubbles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6540080A
Other languages
Japanese (ja)
Inventor
Hisanao Ogata
Hisashi Nakayama
Shoji Isobe
Yasuo Kamiide
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6540080A priority Critical patent/JPS56162282A/en
Publication of JPS56162282A publication Critical patent/JPS56162282A/en
Pending legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

PURPOSE: To smoothen the flow of a coolant in a panel by allowing the gap between two plates to have a plurality of stages, forming passages continuing in the flowing direction of a coolant by using the largest gap portions and locally joining the two plates at the smallest gap portions.
CONSTITUTION: Inside a cryopanel 2, a plurality of passages 5 of a large gap and a plurality of passages 5a of a small gap and having local joints are formed continuously in the flowing direction. The coolant 12 containing quite a number of air bubbles which is supplied into the cryopanel 2 from an injection pipe 11 is divided to flow mainly through a plurality of passages 5 of a large gap, which continue in the flowing direction, and gathered in an upper fluid reservoir 13 after cooling the cryopanel 2. Through a vapor-liquid separator 14, only the gas component is returned to an external refrigerating liquifier (not shown) from a return pipe 15. In addition, the air bubbles generated in the passages 5a of a small gap are drawn into upward flows in the passages 5. Thereby, the air bubbles are discharged extremely smoothly.
COPYRIGHT: (C)1981,JPO&Japio
JP6540080A 1980-05-19 1980-05-19 Cryopump Pending JPS56162282A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6540080A JPS56162282A (en) 1980-05-19 1980-05-19 Cryopump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6540080A JPS56162282A (en) 1980-05-19 1980-05-19 Cryopump

Publications (1)

Publication Number Publication Date
JPS56162282A true JPS56162282A (en) 1981-12-14

Family

ID=13285920

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6540080A Pending JPS56162282A (en) 1980-05-19 1980-05-19 Cryopump

Country Status (1)

Country Link
JP (1) JPS56162282A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58195082U (en) * 1982-06-23 1983-12-24 三菱重工業株式会社 cryopump

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58195082U (en) * 1982-06-23 1983-12-24 三菱重工業株式会社 cryopump

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