JPS56157874A - Measuring method of characteristics of semiconductor device - Google Patents

Measuring method of characteristics of semiconductor device

Info

Publication number
JPS56157874A
JPS56157874A JP6049380A JP6049380A JPS56157874A JP S56157874 A JPS56157874 A JP S56157874A JP 6049380 A JP6049380 A JP 6049380A JP 6049380 A JP6049380 A JP 6049380A JP S56157874 A JPS56157874 A JP S56157874A
Authority
JP
Japan
Prior art keywords
pattern
terminals
discrimination
measuring
monitor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6049380A
Other languages
Japanese (ja)
Inventor
Masayuki Kitano
Hidetomo Doi
Hidekuni Ishida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP6049380A priority Critical patent/JPS56157874A/en
Publication of JPS56157874A publication Critical patent/JPS56157874A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2884—Testing of integrated circuits [IC] using dedicated test connectors, test elements or test circuits on the IC under test

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

PURPOSE:To make change-over of a measuring circuit before the starting of measuring by a method wherein the discrimination terminals are provided on an element pattern and monitor pattern on a semiconductor substrate and resistance values between the discrimination terminals on the element and the monitor different from each other. CONSTITUTION:Discrimination terminals 12x and 12y are provided on the peripheral part of the semiconductor element pattern 12. Likewise, discrimination terminals 13x and 13y are provided on the monitor pattern 13. The terminals 12x and 12y are separated with a fixed distance given while the terminals 13x and 13y are almost interconnected. Therefore, the pattern 12 shows indefinitely-large electric resistance, and the pattern 13 the resistance value of 0. The change-over of a measuring circuit is possible by detecting the resistance values, and the measuring time is shortened.
JP6049380A 1980-05-09 1980-05-09 Measuring method of characteristics of semiconductor device Pending JPS56157874A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6049380A JPS56157874A (en) 1980-05-09 1980-05-09 Measuring method of characteristics of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6049380A JPS56157874A (en) 1980-05-09 1980-05-09 Measuring method of characteristics of semiconductor device

Publications (1)

Publication Number Publication Date
JPS56157874A true JPS56157874A (en) 1981-12-05

Family

ID=13143865

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6049380A Pending JPS56157874A (en) 1980-05-09 1980-05-09 Measuring method of characteristics of semiconductor device

Country Status (1)

Country Link
JP (1) JPS56157874A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5244178A (en) * 1975-10-06 1977-04-06 Hitachi Ltd Semiconductor integrated circuit device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5244178A (en) * 1975-10-06 1977-04-06 Hitachi Ltd Semiconductor integrated circuit device

Similar Documents

Publication Publication Date Title
JPS52105851A (en) Tire condition detecting circuit
JPS6450948A (en) Ion activity measuring sensor, manufacture thereof and sensor attachment circuit therefor
GB1552781A (en) Ripple detecting circuit for detecting electrical faults
AR211824A1 (en) ELECTRICAL CONNECTION TERMINAL
JPS56157874A (en) Measuring method of characteristics of semiconductor device
AU519283B2 (en) Unbalanced d. c. voltage detecting circuit
JPS5329609A (en) Detecting circuit for data signal
JPS5383472A (en) Semiconductor element
NL7712650A (en) HOUSING FOR EQUIPMENT FOR ELECTRICAL COMMUNICATION AND MEASUREMENT TECHNOLOGY.
JPS5342327A (en) Circuit for detecting battery life
JPS5378173A (en) Manufacture of semiconductor device
AU7009881A (en) Sensing short circuit faults
JPS5436984A (en) Pressure measuring apparatus
JPS52128071A (en) Automatic test unit
JPS544078A (en) Inspection method of performance of circuit element
JPS5752871A (en) Emergency position detector
JPS5365072A (en) Evaulation method of mos type integrated circuit
JPS5468673A (en) Electronic watch
JPS5325835A (en) Battery life detecting circuit
JPS5319074A (en) Current value measuring circuit
JPS5433768A (en) Tester for insulated resistor
JPS6484630A (en) Measuring jig for semiconductor integrated circuit
JPS52133295A (en) External atmosphere detector
JPS5227294A (en) Manufacturing method of electro-chromism
JPS573423A (en) Digital-to-analog converter