JPS56156014A - Piezoelectric oscillator - Google Patents

Piezoelectric oscillator

Info

Publication number
JPS56156014A
JPS56156014A JP5967180A JP5967180A JPS56156014A JP S56156014 A JPS56156014 A JP S56156014A JP 5967180 A JP5967180 A JP 5967180A JP 5967180 A JP5967180 A JP 5967180A JP S56156014 A JPS56156014 A JP S56156014A
Authority
JP
Japan
Prior art keywords
case
held
piezoelectric oscillator
lower surfaces
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5967180A
Other languages
Japanese (ja)
Inventor
Kenji Iguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Suwa Seikosha KK filed Critical Seiko Epson Corp
Priority to JP5967180A priority Critical patent/JPS56156014A/en
Publication of JPS56156014A publication Critical patent/JPS56156014A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/0595—Holders; Supports the holder support and resonator being formed in one body
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders; Supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1035—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by two sealing substrates sandwiching the piezoelectric layer of the BAW device

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To increase the airtight reliability of a case member, by giving the photoetching to a case plate and case frame by convering over both the upper and lower surfaces with a resist film. CONSTITUTION:A piezoelectric oscillator bar 4 is held by the upper and lower case frames 6 and 8, and when the case plates 5 and 7 are held to be heated in a vacuum atmosphere. Thus the junction members 5c, 6c, 7c and 8c are melted to perform a vacuum sealing. In such way, both the upper and lower surfaces of the case member can receive a workig with no direct touch to the etching solution. As a result, no etching tunnel pierces through in the thickness direction of the case.
JP5967180A 1980-05-06 1980-05-06 Piezoelectric oscillator Pending JPS56156014A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5967180A JPS56156014A (en) 1980-05-06 1980-05-06 Piezoelectric oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5967180A JPS56156014A (en) 1980-05-06 1980-05-06 Piezoelectric oscillator

Publications (1)

Publication Number Publication Date
JPS56156014A true JPS56156014A (en) 1981-12-02

Family

ID=13119877

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5967180A Pending JPS56156014A (en) 1980-05-06 1980-05-06 Piezoelectric oscillator

Country Status (1)

Country Link
JP (1) JPS56156014A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4670507A (en) * 1985-08-02 1987-06-02 American Hoechst Corporation Resin
US5886457A (en) * 1996-12-03 1999-03-23 Murata Manufacturing Co., Ltd. Sealing structure and method of sealing electronic component
US8013499B2 (en) * 2007-12-05 2011-09-06 Seiko Instruments Inc. Piezoelectric vibrator having a piezoelectric vibrating strip in a cavity

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4670507A (en) * 1985-08-02 1987-06-02 American Hoechst Corporation Resin
US5886457A (en) * 1996-12-03 1999-03-23 Murata Manufacturing Co., Ltd. Sealing structure and method of sealing electronic component
US8013499B2 (en) * 2007-12-05 2011-09-06 Seiko Instruments Inc. Piezoelectric vibrator having a piezoelectric vibrating strip in a cavity

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