JPS56155631A - Powder treatment device utilizing plasma generated by microwave - Google Patents
Powder treatment device utilizing plasma generated by microwaveInfo
- Publication number
- JPS56155631A JPS56155631A JP5860980A JP5860980A JPS56155631A JP S56155631 A JPS56155631 A JP S56155631A JP 5860980 A JP5860980 A JP 5860980A JP 5860980 A JP5860980 A JP 5860980A JP S56155631 A JPS56155631 A JP S56155631A
- Authority
- JP
- Japan
- Prior art keywords
- container
- plasma
- powder
- microwave
- pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Devices And Processes Conducted In The Presence Of Fluids And Solid Particles (AREA)
Abstract
PURPOSE: To enable to treat a powder at a high energy efficiency without using large amounts of reactive gases by incorporating a powder container in a plasma- producing pipe coaxially.
CONSTITUTION: Silica powder 7 is contained in the powder container 8, which is then incorporated in the plasma-producing pipe 5. A pump 17d of an evacuating device 17 is operated to evacuate the whole system including the plasma-producing pipe 5. Then, after further evacuating the system by operating a diffusion pump 17c, a valve 17a is closed and a valve 19 is opened to feed a gaseous mixture of nitrogen and hydrogen from a cylinder 22 into the pipe 5. A rotation introducing machine 26 is operated to rotate the container 8, thereby constantly maintaining the silica powder 7 in a stirred condition. In this condition, microwave power is supplied from a microwave oscillator 1, whereby a mixed gas plasma 25 of nitrogen and hydrogen is produced in the interior of the pipe 5 and the container 8. After continuing the combined reaction of reduction and nitriding the microwave discharge is stopped, the valves 19, 17 are closed while a valve 27 is opened, and nitrogen gas is introduced into the system until the pressure in the whole system reaches the atmospheric pressure. Then, the container 8 is taken out.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5860980A JPS56155631A (en) | 1980-05-06 | 1980-05-06 | Powder treatment device utilizing plasma generated by microwave |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5860980A JPS56155631A (en) | 1980-05-06 | 1980-05-06 | Powder treatment device utilizing plasma generated by microwave |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS56155631A true JPS56155631A (en) | 1981-12-01 |
Family
ID=13089264
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5860980A Pending JPS56155631A (en) | 1980-05-06 | 1980-05-06 | Powder treatment device utilizing plasma generated by microwave |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56155631A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1998028117A1 (en) * | 1996-12-20 | 1998-07-02 | Iveco Gmbh & Co. Kg | Installation for low-pressure plasma processing |
| LU90986B1 (en) * | 2002-11-07 | 2004-05-10 | Plasma Metal S A | Process for nitriding articles in bulk. |
-
1980
- 1980-05-06 JP JP5860980A patent/JPS56155631A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1998028117A1 (en) * | 1996-12-20 | 1998-07-02 | Iveco Gmbh & Co. Kg | Installation for low-pressure plasma processing |
| LU90986B1 (en) * | 2002-11-07 | 2004-05-10 | Plasma Metal S A | Process for nitriding articles in bulk. |
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