JPS56145135A - Deposition method - Google Patents

Deposition method

Info

Publication number
JPS56145135A
JPS56145135A JP4841880A JP4841880A JPS56145135A JP S56145135 A JPS56145135 A JP S56145135A JP 4841880 A JP4841880 A JP 4841880A JP 4841880 A JP4841880 A JP 4841880A JP S56145135 A JPS56145135 A JP S56145135A
Authority
JP
Japan
Prior art keywords
deposition material
laser beams
cylinder
glass cylinder
glass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4841880A
Other languages
Japanese (ja)
Other versions
JPS64335B2 (en
Inventor
Taketoshi Yonezawa
Kazufumi Ogawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP4841880A priority Critical patent/JPS56145135A/en
Publication of JPS56145135A publication Critical patent/JPS56145135A/en
Publication of JPS64335B2 publication Critical patent/JPS64335B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation

Abstract

PURPOSE:Laser beams are effectively used to effect deposition on the inner surface of glass cylinders of a small diameter, thus forming films of the deposition material in a predetemined thickness with high accuracy. CONSTITUTION:A glass cylinder 1 is placed on the roller 8 and the deposition material 6 held in the carrier 5 is introduced into the inside of the cylinder 1. The glass cylinder is made vacuum inside and preheated. Then, laser beams 10 are focused through the condensing lens 9 on the deposition material 6, while the cylinder is being made to rotate by the driving shaft 7. The deposition material vaporizes almost instantly and deposites on the inner surface of the glass cylinder 1. The laser beams are made to shift in the shaft direction and the deposition material is spirally deposited on the inner surface. Then, the laser beams are focused near the inner surface of the glass cylinder 1 to trim the deposited conductive substance in a desired pattern. This method is suitably used to form the eccentric electrode in an electromagnetic focusing electrostatic deflection type camera tube.
JP4841880A 1980-04-13 1980-04-13 Deposition method Granted JPS56145135A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4841880A JPS56145135A (en) 1980-04-13 1980-04-13 Deposition method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4841880A JPS56145135A (en) 1980-04-13 1980-04-13 Deposition method

Publications (2)

Publication Number Publication Date
JPS56145135A true JPS56145135A (en) 1981-11-11
JPS64335B2 JPS64335B2 (en) 1989-01-06

Family

ID=12802762

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4841880A Granted JPS56145135A (en) 1980-04-13 1980-04-13 Deposition method

Country Status (1)

Country Link
JP (1) JPS56145135A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2005019103A1 (en) * 2003-08-20 2007-10-04 日本電気株式会社 Nanocarbon production apparatus and method for producing nanocarbon

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5183538A (en) * 1975-01-20 1976-07-22 Hitachi Ltd MAKUNOKEISEIHOHO
JPS531140A (en) * 1976-06-25 1978-01-07 Ulvac Corp Method of coating inner surface of tube using energy source for heating
JPS5487684A (en) * 1977-12-21 1979-07-12 Ibm Vacuum evaporation method

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5183538A (en) * 1975-01-20 1976-07-22 Hitachi Ltd MAKUNOKEISEIHOHO
JPS531140A (en) * 1976-06-25 1978-01-07 Ulvac Corp Method of coating inner surface of tube using energy source for heating
JPS5487684A (en) * 1977-12-21 1979-07-12 Ibm Vacuum evaporation method

Also Published As

Publication number Publication date
JPS64335B2 (en) 1989-01-06

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