JPS531140A - Method of coating inner surface of tube using energy source for heating - Google Patents

Method of coating inner surface of tube using energy source for heating

Info

Publication number
JPS531140A
JPS531140A JP7449576A JP7449576A JPS531140A JP S531140 A JPS531140 A JP S531140A JP 7449576 A JP7449576 A JP 7449576A JP 7449576 A JP7449576 A JP 7449576A JP S531140 A JPS531140 A JP S531140A
Authority
JP
Japan
Prior art keywords
heating
tube
energy source
coating inner
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7449576A
Other languages
Japanese (ja)
Inventor
Kazuo Nakamura
Muneharu Komiya
Yoshitaka Noguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP7449576A priority Critical patent/JPS531140A/en
Publication of JPS531140A publication Critical patent/JPS531140A/en
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP7449576A 1976-06-25 1976-06-25 Method of coating inner surface of tube using energy source for heating Pending JPS531140A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7449576A JPS531140A (en) 1976-06-25 1976-06-25 Method of coating inner surface of tube using energy source for heating

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7449576A JPS531140A (en) 1976-06-25 1976-06-25 Method of coating inner surface of tube using energy source for heating

Publications (1)

Publication Number Publication Date
JPS531140A true JPS531140A (en) 1978-01-07

Family

ID=13548929

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7449576A Pending JPS531140A (en) 1976-06-25 1976-06-25 Method of coating inner surface of tube using energy source for heating

Country Status (1)

Country Link
JP (1) JPS531140A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56145135A (en) * 1980-04-13 1981-11-11 Matsushita Electric Ind Co Ltd Deposition method
CN108930018A (en) * 2018-08-09 2018-12-04 南通大学 A kind of elongated tubular product accessory inner surface vacuum coater

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4973385A (en) * 1972-11-15 1974-07-16
JPS49109273A (en) * 1973-02-22 1974-10-17
JPS5016120B1 (en) * 1970-12-31 1975-06-10

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5016120B1 (en) * 1970-12-31 1975-06-10
JPS4973385A (en) * 1972-11-15 1974-07-16
JPS49109273A (en) * 1973-02-22 1974-10-17

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56145135A (en) * 1980-04-13 1981-11-11 Matsushita Electric Ind Co Ltd Deposition method
JPS64335B2 (en) * 1980-04-13 1989-01-06 Matsushita Electric Ind Co Ltd
CN108930018A (en) * 2018-08-09 2018-12-04 南通大学 A kind of elongated tubular product accessory inner surface vacuum coater

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