JPS56142675A - Semiconductor memory and method of forming same - Google Patents
Semiconductor memory and method of forming sameInfo
- Publication number
- JPS56142675A JPS56142675A JP63381A JP63381A JPS56142675A JP S56142675 A JPS56142675 A JP S56142675A JP 63381 A JP63381 A JP 63381A JP 63381 A JP63381 A JP 63381A JP S56142675 A JPS56142675 A JP S56142675A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor memory
- forming same
- forming
- same
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Semiconductor Memories (AREA)
- Non-Volatile Memory (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Read Only Memory (AREA)
- Static Random-Access Memory (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06/110,052 US4373248A (en) | 1978-07-12 | 1980-01-07 | Method of making high density semiconductor device such as floating gate electrically programmable ROM or the like |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3238268A Division JP2568770B2 (ja) | 1980-01-07 | 1991-09-18 | 高密度メモリアレイとそれを形成する方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS56142675A true JPS56142675A (en) | 1981-11-07 |
JPH0554267B2 JPH0554267B2 (enrdf_load_stackoverflow) | 1993-08-12 |
Family
ID=22330985
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP63381A Granted JPS56142675A (en) | 1980-01-07 | 1981-01-06 | Semiconductor memory and method of forming same |
JP3238268A Expired - Lifetime JP2568770B2 (ja) | 1980-01-07 | 1991-09-18 | 高密度メモリアレイとそれを形成する方法 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3238268A Expired - Lifetime JP2568770B2 (ja) | 1980-01-07 | 1991-09-18 | 高密度メモリアレイとそれを形成する方法 |
Country Status (1)
Country | Link |
---|---|
JP (2) | JPS56142675A (enrdf_load_stackoverflow) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61222159A (ja) * | 1985-01-30 | 1986-10-02 | テキサス インスツルメンツ インコ−ポレイテツド | 電気的にプログラム可能なメモリ・セル |
US5672529A (en) * | 1994-03-31 | 1997-09-30 | Hitachi, Ltd. | Method of manufacturing nonvolatile semiconductor memory device |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6429063B1 (en) * | 1999-10-26 | 2002-08-06 | Saifun Semiconductors Ltd. | NROM cell with generally decoupled primary and secondary injection |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53124085A (en) * | 1977-01-26 | 1978-10-30 | Texas Instruments Inc | Semiconductor memory |
JPS5474383A (en) * | 1977-11-26 | 1979-06-14 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS55141750A (en) * | 1979-04-23 | 1980-11-05 | Nec Corp | Insulated gate type semiconductor device |
JPS5696854A (en) * | 1979-12-29 | 1981-08-05 | Fujitsu Ltd | Semiconductor memory device |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52119085A (en) * | 1976-03-10 | 1977-10-06 | Nec Corp | Semiconductor memory element |
JPS5377480A (en) * | 1976-12-21 | 1978-07-08 | Nec Corp | Production of semiconductor integrated circuit device |
JPS547889A (en) * | 1977-06-20 | 1979-01-20 | Nec Corp | Semiconductor memory element |
JPS6042633B2 (ja) * | 1978-06-07 | 1985-09-24 | ソニー株式会社 | 絶縁ゲ−ト型メモリ素子の製法 |
-
1981
- 1981-01-06 JP JP63381A patent/JPS56142675A/ja active Granted
-
1991
- 1991-09-18 JP JP3238268A patent/JP2568770B2/ja not_active Expired - Lifetime
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53124085A (en) * | 1977-01-26 | 1978-10-30 | Texas Instruments Inc | Semiconductor memory |
JPS5474383A (en) * | 1977-11-26 | 1979-06-14 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS55141750A (en) * | 1979-04-23 | 1980-11-05 | Nec Corp | Insulated gate type semiconductor device |
JPS5696854A (en) * | 1979-12-29 | 1981-08-05 | Fujitsu Ltd | Semiconductor memory device |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61222159A (ja) * | 1985-01-30 | 1986-10-02 | テキサス インスツルメンツ インコ−ポレイテツド | 電気的にプログラム可能なメモリ・セル |
US5672529A (en) * | 1994-03-31 | 1997-09-30 | Hitachi, Ltd. | Method of manufacturing nonvolatile semiconductor memory device |
US6406958B2 (en) | 1994-03-31 | 2002-06-18 | Hitachi, Ltd. | Method of manufacturing nonvolatile semiconductor memory device |
Also Published As
Publication number | Publication date |
---|---|
JPH056981A (ja) | 1993-01-14 |
JPH0554267B2 (enrdf_load_stackoverflow) | 1993-08-12 |
JP2568770B2 (ja) | 1997-01-08 |
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