JPS5613742A - Probe-card - Google Patents

Probe-card

Info

Publication number
JPS5613742A
JPS5613742A JP9020279A JP9020279A JPS5613742A JP S5613742 A JPS5613742 A JP S5613742A JP 9020279 A JP9020279 A JP 9020279A JP 9020279 A JP9020279 A JP 9020279A JP S5613742 A JPS5613742 A JP S5613742A
Authority
JP
Japan
Prior art keywords
point
probe
tip
constitution
spring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9020279A
Other languages
Japanese (ja)
Inventor
Susumu Nakamori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP9020279A priority Critical patent/JPS5613742A/en
Publication of JPS5613742A publication Critical patent/JPS5613742A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To ensure contact with an electrode by a method wherein a tip portion of a probing needle is made more elastic than a rigid bar portion of the other tip. CONSTITUTION:A rigid bar portion up to a connecting point E from D to a print substrate is made of hard metal, such as W, etc. With a tip portion up to a point F from its head point E, a spring is connected, and the portion is used as a probing needle. When the characteristics of a semiconductor element are measured by employing a probe-card according to this constitution, fixed pressure is applied to the element at the point F due to the contraction of the spring and a contact location is unnecessary.
JP9020279A 1979-07-16 1979-07-16 Probe-card Pending JPS5613742A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9020279A JPS5613742A (en) 1979-07-16 1979-07-16 Probe-card

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9020279A JPS5613742A (en) 1979-07-16 1979-07-16 Probe-card

Publications (1)

Publication Number Publication Date
JPS5613742A true JPS5613742A (en) 1981-02-10

Family

ID=13991894

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9020279A Pending JPS5613742A (en) 1979-07-16 1979-07-16 Probe-card

Country Status (1)

Country Link
JP (1) JPS5613742A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6157558U (en) * 1984-09-18 1986-04-17
JPH02184042A (en) * 1989-01-10 1990-07-18 Fujitsu Ltd Probe card
JPH0387166A (en) * 1989-09-29 1991-04-11 Besuto F Kk Method for freeze-storage of food
JPH03209738A (en) * 1990-01-11 1991-09-12 Tokyo Electron Ltd Probe card
US5214375A (en) * 1989-02-06 1993-05-25 Giga Probe, Inc. Multi-point probe assembly for testing electronic device
US5355080A (en) * 1989-08-07 1994-10-11 Giga Probe, Inc. Multi-point probe assembly for testing electronic device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6157558U (en) * 1984-09-18 1986-04-17
JPH02184042A (en) * 1989-01-10 1990-07-18 Fujitsu Ltd Probe card
US5214375A (en) * 1989-02-06 1993-05-25 Giga Probe, Inc. Multi-point probe assembly for testing electronic device
US5355080A (en) * 1989-08-07 1994-10-11 Giga Probe, Inc. Multi-point probe assembly for testing electronic device
JPH0387166A (en) * 1989-09-29 1991-04-11 Besuto F Kk Method for freeze-storage of food
JPH03209738A (en) * 1990-01-11 1991-09-12 Tokyo Electron Ltd Probe card

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