JPS56137205A - Apparatus for measuring flatness - Google Patents
Apparatus for measuring flatnessInfo
- Publication number
- JPS56137205A JPS56137205A JP4140480A JP4140480A JPS56137205A JP S56137205 A JPS56137205 A JP S56137205A JP 4140480 A JP4140480 A JP 4140480A JP 4140480 A JP4140480 A JP 4140480A JP S56137205 A JPS56137205 A JP S56137205A
- Authority
- JP
- Japan
- Prior art keywords
- measured
- prism
- photo detectors
- light
- detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4140480A JPS56137205A (en) | 1980-03-31 | 1980-03-31 | Apparatus for measuring flatness |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4140480A JPS56137205A (en) | 1980-03-31 | 1980-03-31 | Apparatus for measuring flatness |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS56137205A true JPS56137205A (en) | 1981-10-27 |
Family
ID=12607423
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4140480A Pending JPS56137205A (en) | 1980-03-31 | 1980-03-31 | Apparatus for measuring flatness |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56137205A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03269311A (ja) * | 1990-03-20 | 1991-11-29 | Copal Electron Co Ltd | 光ビーム位置検出装置 |
-
1980
- 1980-03-31 JP JP4140480A patent/JPS56137205A/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03269311A (ja) * | 1990-03-20 | 1991-11-29 | Copal Electron Co Ltd | 光ビーム位置検出装置 |
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