JPS56130934A - Inspecting device for semiconductor element - Google Patents

Inspecting device for semiconductor element

Info

Publication number
JPS56130934A
JPS56130934A JP3428580A JP3428580A JPS56130934A JP S56130934 A JPS56130934 A JP S56130934A JP 3428580 A JP3428580 A JP 3428580A JP 3428580 A JP3428580 A JP 3428580A JP S56130934 A JPS56130934 A JP S56130934A
Authority
JP
Japan
Prior art keywords
semiconductors
semiconductor element
mirror
semiconductor
conveying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3428580A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0139217B2 (OSRAM
Inventor
Naoto Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Kyushu Ltd
Original Assignee
NEC Kyushu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Kyushu Ltd filed Critical NEC Kyushu Ltd
Priority to JP3428580A priority Critical patent/JPS56130934A/ja
Publication of JPS56130934A publication Critical patent/JPS56130934A/ja
Publication of JPH0139217B2 publication Critical patent/JPH0139217B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/02—Viewing or reading apparatus
    • G02B27/022—Viewing apparatus
    • G02B27/024—Viewing apparatus comprising a light source, e.g. for viewing photographic slides, X-ray transparancies
    • G02B27/025—Viewing apparatus comprising a light source, e.g. for viewing photographic slides, X-ray transparancies and magnifying means
    • H10W72/536—
    • H10W72/5363—

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Microscoopes, Condenser (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Wire Bonding (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP3428580A 1980-03-17 1980-03-17 Inspecting device for semiconductor element Granted JPS56130934A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3428580A JPS56130934A (en) 1980-03-17 1980-03-17 Inspecting device for semiconductor element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3428580A JPS56130934A (en) 1980-03-17 1980-03-17 Inspecting device for semiconductor element

Publications (2)

Publication Number Publication Date
JPS56130934A true JPS56130934A (en) 1981-10-14
JPH0139217B2 JPH0139217B2 (OSRAM) 1989-08-18

Family

ID=12409880

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3428580A Granted JPS56130934A (en) 1980-03-17 1980-03-17 Inspecting device for semiconductor element

Country Status (1)

Country Link
JP (1) JPS56130934A (OSRAM)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57115843A (en) * 1981-01-10 1982-07-19 Mitsubishi Electric Corp Testing device for wafer
JPS58142548A (ja) * 1982-02-18 1983-08-24 Nec Corp Ｉｃハンドリング装置
JPS61179549A (ja) * 1985-02-04 1986-08-12 Olympus Optical Co Ltd ウエハ検査顕微鏡装置
JPS6255501A (ja) * 1985-09-04 1987-03-11 Canon Inc レ−ザ測長装置
JPS6394650A (ja) * 1986-10-08 1988-04-25 Tokyo Electron Ltd プロ−ブ装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57115843A (en) * 1981-01-10 1982-07-19 Mitsubishi Electric Corp Testing device for wafer
JPS58142548A (ja) * 1982-02-18 1983-08-24 Nec Corp Ｉｃハンドリング装置
JPS61179549A (ja) * 1985-02-04 1986-08-12 Olympus Optical Co Ltd ウエハ検査顕微鏡装置
JPS6255501A (ja) * 1985-09-04 1987-03-11 Canon Inc レ−ザ測長装置
JPS6394650A (ja) * 1986-10-08 1988-04-25 Tokyo Electron Ltd プロ−ブ装置

Also Published As

Publication number Publication date
JPH0139217B2 (OSRAM) 1989-08-18

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