JPS56125650A - Sample holding device - Google Patents

Sample holding device

Info

Publication number
JPS56125650A
JPS56125650A JP2796980A JP2796980A JPS56125650A JP S56125650 A JPS56125650 A JP S56125650A JP 2796980 A JP2796980 A JP 2796980A JP 2796980 A JP2796980 A JP 2796980A JP S56125650 A JPS56125650 A JP S56125650A
Authority
JP
Japan
Prior art keywords
shield body
sample
sputter particles
sputter
holding device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2796980A
Other languages
Japanese (ja)
Inventor
Eiichi Izumi
Yoshio Arima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2796980A priority Critical patent/JPS56125650A/en
Publication of JPS56125650A publication Critical patent/JPS56125650A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To make shielding against the leakage of sputter particles more perfect by providing an another shield body further on the outer side of a sputter particle shield body. CONSTITUTION:A shield body 8 for sputter particles 7 is provided freely removably in a manner as to enclose the neighborhood of a sample 5. The sample 5 is loaded in a fine adjusting mechanism 9. The shield body 8 for sputter particles 7 is supported by a supporting body 10 from the base plate part of the mechanism 9. Therefore, the shield body 8 is always held in the same position irrespective of the fine adjustment of the sample 5. The sputter particles 7 leaking through the hole parts of the shield body 8 are further shielded by the another shield body 11 installed freely removably adjacently to the inside wall of a sample chamber 6.
JP2796980A 1980-03-07 1980-03-07 Sample holding device Pending JPS56125650A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2796980A JPS56125650A (en) 1980-03-07 1980-03-07 Sample holding device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2796980A JPS56125650A (en) 1980-03-07 1980-03-07 Sample holding device

Publications (1)

Publication Number Publication Date
JPS56125650A true JPS56125650A (en) 1981-10-02

Family

ID=12235709

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2796980A Pending JPS56125650A (en) 1980-03-07 1980-03-07 Sample holding device

Country Status (1)

Country Link
JP (1) JPS56125650A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6420434A (en) * 1987-07-15 1989-01-24 Shimadzu Corp Ion etching device
WO2017021655A1 (en) * 2015-08-03 2017-02-09 Commissariat à l'énergie atomique et aux énergies alternatives Method and device for the ion beam analysis of a sample
FR3045153A1 (en) * 2015-12-10 2017-06-16 Commissariat Energie Atomique METHOD AND DEVICE FOR SAMPLING A SAMPLE FROM AN IRRADIANT OBJECT

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6420434A (en) * 1987-07-15 1989-01-24 Shimadzu Corp Ion etching device
WO2017021655A1 (en) * 2015-08-03 2017-02-09 Commissariat à l'énergie atomique et aux énergies alternatives Method and device for the ion beam analysis of a sample
FR3039899A1 (en) * 2015-08-03 2017-02-10 Commissariat Energie Atomique METHOD AND DEVICE FOR ANALYZING A SAMPLE BY ION BEAM
FR3045153A1 (en) * 2015-12-10 2017-06-16 Commissariat Energie Atomique METHOD AND DEVICE FOR SAMPLING A SAMPLE FROM AN IRRADIANT OBJECT

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