JPS56118653A - Contact-type potential difference measuring method for structure of different thickness - Google Patents

Contact-type potential difference measuring method for structure of different thickness

Info

Publication number
JPS56118653A
JPS56118653A JP2046780A JP2046780A JPS56118653A JP S56118653 A JPS56118653 A JP S56118653A JP 2046780 A JP2046780 A JP 2046780A JP 2046780 A JP2046780 A JP 2046780A JP S56118653 A JPS56118653 A JP S56118653A
Authority
JP
Japan
Prior art keywords
potential difference
change
interval
plate thickness
power supply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2046780A
Other languages
Japanese (ja)
Inventor
Kyo Matsuzaka
Choichi Asano
Hiroshi Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2046780A priority Critical patent/JPS56118653A/en
Publication of JPS56118653A publication Critical patent/JPS56118653A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/041Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Measurement Of Resistance Or Impedance (AREA)

Abstract

PURPOSE:To make it possible to highly accurately measure the resistivity change of even large- sized parts having change in configuration and plate thickness by a method wherein the measuring terminal interval is more than 0.8 times as much as the power supply terminal interval, and the power supply terminal interval is less than 0.4 times as much as the plate thickness. CONSTITUTION:The interval between the power supply terminals 1 and 2 of an electric resistance measuring circuit according to the four-terminal potential difference method is represented by L, and the interval between the detecting terminals 3 and 4 by l. The relationship between the potential difference output ratio and l/L is as shown in the figure: when l/L is more than 0.8, the potential difference output is substantially saturated, and a high output can be obtained, so that the resistance change can be measured with high sensitivity. On the other hand, if the plate thickness to be measured is represented by (t), the relationship between the output potential difference and L/t is as shown in the figure: when L/t>0.5, only a minute change in plate thickness causes the potential difference value to vary, so that the degree of accuracy largely lowers. Therefore, L/t is should be at least less than 0.4. Thereby, for even large-sized parts, the degree of deterioration due to change with time can be highly accurately measured by using a resistivity change.
JP2046780A 1980-02-22 1980-02-22 Contact-type potential difference measuring method for structure of different thickness Pending JPS56118653A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2046780A JPS56118653A (en) 1980-02-22 1980-02-22 Contact-type potential difference measuring method for structure of different thickness

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2046780A JPS56118653A (en) 1980-02-22 1980-02-22 Contact-type potential difference measuring method for structure of different thickness

Publications (1)

Publication Number Publication Date
JPS56118653A true JPS56118653A (en) 1981-09-17

Family

ID=12027890

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2046780A Pending JPS56118653A (en) 1980-02-22 1980-02-22 Contact-type potential difference measuring method for structure of different thickness

Country Status (1)

Country Link
JP (1) JPS56118653A (en)

Similar Documents

Publication Publication Date Title
JPS6450948A (en) Ion activity measuring sensor, manufacture thereof and sensor attachment circuit therefor
JPS5522162A (en) Sodium leak detecting method and device
JPS56118653A (en) Contact-type potential difference measuring method for structure of different thickness
JPS57113241A (en) Semiconductor device
JPS5765053A (en) Test method for subscriber line
JPS5329725A (en) Detection method for deterioration of developer
JPS57128808A (en) Distance measuring equipment
JPS5740949A (en) Measurement of resistivity of semiconductor
JPS57154069A (en) Measuring device for electric resistance
JPS5624351A (en) Gravure resist inspecting method
JPS5313967A (en) Measuring method for characteristic of vibration gauge
JPS56112602A (en) Measuring device for thickness of nonmagnetic thin metal plate
JPS5312373A (en) Measuring apparatus for temperature difference
JPS52128071A (en) Automatic test unit
JPS5376079A (en) Voltage detecting circuit
JPS562572A (en) Measuring instrument for characteristic of electronic parts
JPS5717873A (en) Inspection method of semiconductor element
GB1282035A (en) Measurements with digital voltmeters
JPS5320368A (en) Measuring device for resistance of conductor
JPS5687882A (en) Heliograph
JPS5333691A (en) Measurement of alternating current corrosion
JPS6469971A (en) Checking apparatus of characteristics of semiconductor element
JPS53125771A (en) Measuring unit for semiconductor
JPS5612558A (en) Insulation resistance meter
JPS54135584A (en) Electrostatic capacity type measuring apparatus