JPS56116260A - Scanning focusing electron beam diffracting device - Google Patents

Scanning focusing electron beam diffracting device

Info

Publication number
JPS56116260A
JPS56116260A JP1964480A JP1964480A JPS56116260A JP S56116260 A JPS56116260 A JP S56116260A JP 1964480 A JP1964480 A JP 1964480A JP 1964480 A JP1964480 A JP 1964480A JP S56116260 A JPS56116260 A JP S56116260A
Authority
JP
Japan
Prior art keywords
sample
lens
electron beam
scanning
diffracted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1964480A
Other languages
English (en)
Other versions
JPH0821354B2 (ja
Inventor
Michiyoshi Tanaka
Katsuyoshi Ueno
Yoshiyasu Harada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP1964480A priority Critical patent/JPH0821354B2/ja
Publication of JPS56116260A publication Critical patent/JPS56116260A/ja
Publication of JPH0821354B2 publication Critical patent/JPH0821354B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/295—Electron or ion diffraction tubes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP1964480A 1980-02-19 1980-02-19 走査型収束電子線回折装置 Expired - Lifetime JPH0821354B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1964480A JPH0821354B2 (ja) 1980-02-19 1980-02-19 走査型収束電子線回折装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1964480A JPH0821354B2 (ja) 1980-02-19 1980-02-19 走査型収束電子線回折装置

Publications (2)

Publication Number Publication Date
JPS56116260A true JPS56116260A (en) 1981-09-11
JPH0821354B2 JPH0821354B2 (ja) 1996-03-04

Family

ID=12004935

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1964480A Expired - Lifetime JPH0821354B2 (ja) 1980-02-19 1980-02-19 走査型収束電子線回折装置

Country Status (1)

Country Link
JP (1) JPH0821354B2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013161473A1 (ja) * 2012-04-27 2013-10-31 株式会社 日立ハイテクノロジーズ 走査電子顕微鏡

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013161473A1 (ja) * 2012-04-27 2013-10-31 株式会社 日立ハイテクノロジーズ 走査電子顕微鏡
JP2013229267A (ja) * 2012-04-27 2013-11-07 Hitachi High-Technologies Corp 走査電子顕微鏡
CN104272426A (zh) * 2012-04-27 2015-01-07 株式会社日立高新技术 扫描电子显微镜
US9040911B2 (en) 2012-04-27 2015-05-26 Hitachi High-Technologies Corporation Scanning electron microscope

Also Published As

Publication number Publication date
JPH0821354B2 (ja) 1996-03-04

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