JPS56114257A - Ion source apparatus - Google Patents

Ion source apparatus

Info

Publication number
JPS56114257A
JPS56114257A JP1645980A JP1645980A JPS56114257A JP S56114257 A JPS56114257 A JP S56114257A JP 1645980 A JP1645980 A JP 1645980A JP 1645980 A JP1645980 A JP 1645980A JP S56114257 A JPS56114257 A JP S56114257A
Authority
JP
Japan
Prior art keywords
ionized
heater
surface tension
ion source
vicinity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1645980A
Other languages
Japanese (ja)
Other versions
JPS583579B2 (en
Inventor
Masanori Komuro
Kyuzo Kawakatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP1645980A priority Critical patent/JPS583579B2/en
Publication of JPS56114257A publication Critical patent/JPS56114257A/en
Publication of JPS583579B2 publication Critical patent/JPS583579B2/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/26—Ion sources; Ion guns using surface ionisation, e.g. field effect ion sources, thermionic ion sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

PURPOSE:To elongate the life of and miniaturize the size of an equipment by installing the structure coated with material where the surface area to which the substance to be ionized is adhered through surface tension is increased, in the vicinity of a needle electrode. CONSTITUTION:Between the heater parts 2b, 2b which are faced in parallel each other, having the bend part 2a of a heater 2 as a boundary, the beam 4 made desirably of the same material to the heater 2 is bridged. Therefore, the structure 5 coated with material, is formed, where the surface area in the vicinity of a needle electrode where the material 3 to be ionized is adhered positively by surface tension is increased. In this case, the shape and the number of the beams are altered according to the surface tension and viscosity of the material to be ionized.
JP1645980A 1980-02-12 1980-02-12 ion source device Expired JPS583579B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1645980A JPS583579B2 (en) 1980-02-12 1980-02-12 ion source device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1645980A JPS583579B2 (en) 1980-02-12 1980-02-12 ion source device

Publications (2)

Publication Number Publication Date
JPS56114257A true JPS56114257A (en) 1981-09-08
JPS583579B2 JPS583579B2 (en) 1983-01-21

Family

ID=11916825

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1645980A Expired JPS583579B2 (en) 1980-02-12 1980-02-12 ion source device

Country Status (1)

Country Link
JP (1) JPS583579B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4721878A (en) * 1985-06-04 1988-01-26 Denki Kagaku Kogyo Kabushiki Kaisha Charged particle emission source structure

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4721878A (en) * 1985-06-04 1988-01-26 Denki Kagaku Kogyo Kabushiki Kaisha Charged particle emission source structure

Also Published As

Publication number Publication date
JPS583579B2 (en) 1983-01-21

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