JPS56112731A - Mask correcting apparatus - Google Patents

Mask correcting apparatus

Info

Publication number
JPS56112731A
JPS56112731A JP1564880A JP1564880A JPS56112731A JP S56112731 A JPS56112731 A JP S56112731A JP 1564880 A JP1564880 A JP 1564880A JP 1564880 A JP1564880 A JP 1564880A JP S56112731 A JPS56112731 A JP S56112731A
Authority
JP
Japan
Prior art keywords
incorrect region
mask
stage
laser light
incorrect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1564880A
Other languages
Japanese (ja)
Inventor
Keisuke Wakabayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHIYOU LSI GIJUTSU KENKYU KUMIAI
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHIYOU LSI GIJUTSU KENKYU KUMIAI
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHIYOU LSI GIJUTSU KENKYU KUMIAI, CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHIYOU LSI GIJUTSU KENKYU KUMIAI
Priority to JP1564880A priority Critical patent/JPS56112731A/en
Publication of JPS56112731A publication Critical patent/JPS56112731A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)

Abstract

PURPOSE:To precisely correct the mask by detecting the reference position of the mask having incorrect region and fixed to an X-Y stage with a pulse signal to move the stage, setting it at the reference position, irradiating laser light rays thereto, and removing the incorrect region. CONSTITUTION:The mask 21 having incorrect region 21a to be corrected for the mask pattern is secured to the X-Y stage 20, the stage is moved, and disposed directly under the objective lens 22. On the other hand, it is observed through an eyepiece lens 32 with the light from a transmission illumination light source 35, and the slit 26 is set at a value adapted for the shape of incorrect region. Then, the pulse signal is irradiated from the signal source 36 to the incorrect region, the reflected pulse is received by a receiver 37, the laser light rays are irradiated from the laser light source 25 in the state that the incorrect region is set at the focal position with respect to the laser light rays of the objective lens with the detected value, and the incorrect region is removed. Thus, the mask pattern can be corrected with high precision.
JP1564880A 1980-02-12 1980-02-12 Mask correcting apparatus Pending JPS56112731A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1564880A JPS56112731A (en) 1980-02-12 1980-02-12 Mask correcting apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1564880A JPS56112731A (en) 1980-02-12 1980-02-12 Mask correcting apparatus

Publications (1)

Publication Number Publication Date
JPS56112731A true JPS56112731A (en) 1981-09-05

Family

ID=11894532

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1564880A Pending JPS56112731A (en) 1980-02-12 1980-02-12 Mask correcting apparatus

Country Status (1)

Country Link
JP (1) JPS56112731A (en)

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