JPS56108868A - Regeneration of electroless plating electrodialitically by removing at least part of reaction product - Google Patents

Regeneration of electroless plating electrodialitically by removing at least part of reaction product

Info

Publication number
JPS56108868A
JPS56108868A JP2786180A JP2786180A JPS56108868A JP S56108868 A JPS56108868 A JP S56108868A JP 2786180 A JP2786180 A JP 2786180A JP 2786180 A JP2786180 A JP 2786180A JP S56108868 A JPS56108868 A JP S56108868A
Authority
JP
Japan
Prior art keywords
electrodialitically
regeneration
reaction product
electroless plating
electroless
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2786180A
Other languages
English (en)
Other versions
JPH0416549B2 (ja
Inventor
Daburiyuu Gurenda Debuitsudo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Electrochem International Inc
Original Assignee
Electrochem International Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Electrochem International Inc filed Critical Electrochem International Inc
Publication of JPS56108868A publication Critical patent/JPS56108868A/ja
Publication of JPH0416549B2 publication Critical patent/JPH0416549B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/42—Electrodialysis; Electro-osmosis ; Electro-ultrafiltration; Membrane capacitive deionization
    • B01D61/44—Ion-selective electrodialysis
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601—Process or apparatus
    • C23C18/1617—Purification and regeneration of coating baths

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Water Supply & Treatment (AREA)
  • General Chemical & Material Sciences (AREA)
  • Urology & Nephrology (AREA)
  • Health & Medical Sciences (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemically Coating (AREA)
  • Water Treatment By Electricity Or Magnetism (AREA)
JP2786180A 1979-03-05 1980-03-04 Regeneration of electroless plating electrodialitically by removing at least part of reaction product Granted JPS56108868A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US1708679A 1979-03-05 1979-03-05

Publications (2)

Publication Number Publication Date
JPS56108868A true JPS56108868A (en) 1981-08-28
JPH0416549B2 JPH0416549B2 (ja) 1992-03-24

Family

ID=21780648

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2786180A Granted JPS56108868A (en) 1979-03-05 1980-03-04 Regeneration of electroless plating electrodialitically by removing at least part of reaction product

Country Status (6)

Country Link
EP (1) EP0015737B1 (ja)
JP (1) JPS56108868A (ja)
AU (1) AU536421B2 (ja)
DE (1) DE3063023D1 (ja)
MX (1) MX153388A (ja)
ZA (1) ZA801260B (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012200666A (ja) * 2011-03-25 2012-10-22 Dowa Eco-System Co Ltd Ｌｉ溶液回収装置及びＬｉ溶液回収方法
CN104120485A (zh) * 2014-08-13 2014-10-29 湖北三江航天红林探控有限公司 一种电镀铜槽液的处理工艺
CN104562102A (zh) * 2014-12-31 2015-04-29 苏州福莱盈电子有限公司 一种高深度盲孔电镀铜溶液
CN105316713A (zh) * 2015-10-26 2016-02-10 苏州福莱盈电子有限公司 一种电镀铜溶解液及高深度盲孔快速填孔工艺

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4600493A (en) * 1985-01-14 1986-07-15 Morton Thiokol, Inc. Electrodialysis apparatus for the chemical maintenance of electroless copper plating baths
US4762601A (en) * 1986-11-10 1988-08-09 Morton Thiokol, Inc. Copper bath for electroless plating having excess counter-cation and process using same
DE3929137C1 (ja) * 1989-09-01 1991-02-28 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung Ev, 8000 Muenchen, De
DE3929121C1 (ja) * 1989-09-01 1991-02-28 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung Ev, 8000 Muenchen, De
CA2069221A1 (en) * 1992-05-22 1993-11-23 Mark W. Kennedy Process for salt extraction from hydrogen-sulphide scrubber solution using electrodialysis
DE4310366C1 (de) * 1993-03-30 1994-10-13 Fraunhofer Ges Forschung Verfahren zum Regenerieren von wässrigen, außenstromlos arbeitenden Beschichtungsbädern
US6391177B1 (en) 2001-02-20 2002-05-21 David Crotty High temperature continuous electrodialysis of electroless plating solutions
DE102004002778C5 (de) * 2004-01-20 2017-04-20 Enthone Inc. Verfahren zur Regenerierung von Metallisierungsbädern

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS563666A (en) * 1979-06-19 1981-01-14 Hitachi Ltd Method and apparatus for regenerating chemical copper plating solution

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3764503A (en) * 1972-01-19 1973-10-09 Dart Ind Inc Electrodialysis regeneration of metal containing acid solutions
US3909381A (en) * 1974-11-18 1975-09-30 Raymond John L Purification of chromium plating solutions by electrodialysis
DE2606586B2 (de) * 1976-02-19 1980-05-29 Hager + Elsaesser Gmbh, 7000 Stuttgart Verfahren zur Rückgewinnung von Stoffen mittels Membrantrennung
US4049519A (en) * 1976-10-06 1977-09-20 Walter John Sloan Carbonate reduction
US4105534A (en) * 1977-08-29 1978-08-08 John L. Raymond Apparatus for removing impurities from electrolyte solutions

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS563666A (en) * 1979-06-19 1981-01-14 Hitachi Ltd Method and apparatus for regenerating chemical copper plating solution

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012200666A (ja) * 2011-03-25 2012-10-22 Dowa Eco-System Co Ltd Ｌｉ溶液回収装置及びＬｉ溶液回収方法
CN104120485A (zh) * 2014-08-13 2014-10-29 湖北三江航天红林探控有限公司 一种电镀铜槽液的处理工艺
CN104562102A (zh) * 2014-12-31 2015-04-29 苏州福莱盈电子有限公司 一种高深度盲孔电镀铜溶液
CN105316713A (zh) * 2015-10-26 2016-02-10 苏州福莱盈电子有限公司 一种电镀铜溶解液及高深度盲孔快速填孔工艺

Also Published As

Publication number Publication date
EP0015737B1 (en) 1983-05-11
MX153388A (es) 1986-10-07
DE3063023D1 (en) 1983-06-16
ZA801260B (en) 1981-03-25
JPH0416549B2 (ja) 1992-03-24
AU536421B2 (en) 1984-05-10
AU5617080A (en) 1981-09-10
EP0015737A1 (en) 1980-09-17

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