JPS56104226A - Temperature measuring system using infrared ray - Google Patents

Temperature measuring system using infrared ray

Info

Publication number
JPS56104226A
JPS56104226A JP720480A JP720480A JPS56104226A JP S56104226 A JPS56104226 A JP S56104226A JP 720480 A JP720480 A JP 720480A JP 720480 A JP720480 A JP 720480A JP S56104226 A JPS56104226 A JP S56104226A
Authority
JP
Japan
Prior art keywords
infrared ray
electrical signal
emissivity
temperature
measured
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP720480A
Other languages
Japanese (ja)
Inventor
Takaaki Onoe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP720480A priority Critical patent/JPS56104226A/en
Publication of JPS56104226A publication Critical patent/JPS56104226A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/80—Calibration
    • G01J5/802—Calibration by correcting for emissivity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/026—Control of working procedures of a pyrometer, other than calibration; Bandwidth calculation; Gain control
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/06—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
    • G01J5/064—Ambient temperature sensor; Housing temperature sensor; Constructional details thereof
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/70—Passive compensation of pyrometer measurements, e.g. using ambient temperature sensing or sensing of temperature within housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/80—Calibration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/90—Testing, inspecting or checking operation of radiation pyrometers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Radiation Pyrometers (AREA)

Abstract

PURPOSE:To make it possible to obtain the output depending on only the temperature of the object being measured independently of its emissivity by controlling the gain of the amplifying circuit for the electrical signals from an infrared ray sensor by using the electrical signals outputted by a contact type thermoelectric transducer. CONSTITUTION:In the system correction is automatically effected by a feedback controlling system: the infrared ray emitted from a test piece 11 having emissivity approximately equal to that of an object to be measured is made incident on an infrared ray sensor 1 to convert into an electrical signal and a thermistor 12 is attached to the test piece 11 in order to convert its temperature into an electrical signal, which is used to control the gain of an amplifying circuit 2 which amplifies the electrical signal obtained from the infrared ray sensor 1, and thereby the output having the corrected error due to the emissivity of the object being measured can be obtained from a post-amplifier 10. Measuring an object by using a thus regulated measuring apparatus permits an electrical signal truly representing the temperature of the object to be obtained.
JP720480A 1980-01-23 1980-01-23 Temperature measuring system using infrared ray Pending JPS56104226A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP720480A JPS56104226A (en) 1980-01-23 1980-01-23 Temperature measuring system using infrared ray

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP720480A JPS56104226A (en) 1980-01-23 1980-01-23 Temperature measuring system using infrared ray

Publications (1)

Publication Number Publication Date
JPS56104226A true JPS56104226A (en) 1981-08-19

Family

ID=11659487

Family Applications (1)

Application Number Title Priority Date Filing Date
JP720480A Pending JPS56104226A (en) 1980-01-23 1980-01-23 Temperature measuring system using infrared ray

Country Status (1)

Country Link
JP (1) JPS56104226A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61275629A (en) * 1985-05-31 1986-12-05 Chino Corp Radiation thermometer
US4969748A (en) * 1989-04-13 1990-11-13 Peak Systems, Inc. Apparatus and method for compensating for errors in temperature measurement of semiconductor wafers during rapid thermal processing
US4984902A (en) * 1989-04-13 1991-01-15 Peak Systems, Inc. Apparatus and method for compensating for errors in temperature measurement of semiconductor wafers during rapid thermal processing
US5001657A (en) * 1986-06-24 1991-03-19 Minolta Camera Kabushiki Kaisha Radiation thermometer
JPH03237321A (en) * 1990-02-13 1991-10-23 Tokai Carbon Co Ltd Emissivity measuring instrument
US5094544A (en) * 1990-10-19 1992-03-10 Square D Company Scanning infrared thermometer with DC offset and emissivity correction
US5743644A (en) * 1995-05-31 1998-04-28 Anritsu Meter Co., Ltd. Temperature measuring apparatus

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61275629A (en) * 1985-05-31 1986-12-05 Chino Corp Radiation thermometer
JPH0566975B2 (en) * 1985-05-31 1993-09-22 Chino Corp
US5001657A (en) * 1986-06-24 1991-03-19 Minolta Camera Kabushiki Kaisha Radiation thermometer
US4969748A (en) * 1989-04-13 1990-11-13 Peak Systems, Inc. Apparatus and method for compensating for errors in temperature measurement of semiconductor wafers during rapid thermal processing
US4984902A (en) * 1989-04-13 1991-01-15 Peak Systems, Inc. Apparatus and method for compensating for errors in temperature measurement of semiconductor wafers during rapid thermal processing
JPH03237321A (en) * 1990-02-13 1991-10-23 Tokai Carbon Co Ltd Emissivity measuring instrument
US5094544A (en) * 1990-10-19 1992-03-10 Square D Company Scanning infrared thermometer with DC offset and emissivity correction
US5743644A (en) * 1995-05-31 1998-04-28 Anritsu Meter Co., Ltd. Temperature measuring apparatus

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