JPS5591970A - Ion plating device - Google Patents
Ion plating deviceInfo
- Publication number
- JPS5591970A JPS5591970A JP16176278A JP16176278A JPS5591970A JP S5591970 A JPS5591970 A JP S5591970A JP 16176278 A JP16176278 A JP 16176278A JP 16176278 A JP16176278 A JP 16176278A JP S5591970 A JPS5591970 A JP S5591970A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- holder
- charge
- coil
- ionized
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
Abstract
PURPOSE:To enable evaporation while preventing charge-up of electrical charge in the title device even in case a substrate is an insulator by electrically connecting the tip of a coil forming a discharge region between an evaporation source and a substrate holder to the holder. CONSTITUTION:Substrate 9 is set on substrate holder 7, and high-frequency waves are supplied to coil 10 from high frequency oscillator 11, thereby alternatingly changing the positive or negative electric potential of holder 7 connected to one end of coil 10. A heating current is then supplied to heating element 4 from heating power source 6 to heat evaporation source 3, and the resulting evaporated substance is ionized with the above high-frequency electric field. When substrate 9 becomes of negative potential, the ionized substance is attracted and deposited on substrate 9. When holder 7 is of positive potential, electrons existing in the discharge space collide against substrate 9. Accordingly, even in case substrate 9 is an insulator, electrons and the charge of the ionized substance deposited on substrate 9 are neutralized to prevent charge-up of substrate 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16176278A JPS5591970A (en) | 1978-12-28 | 1978-12-28 | Ion plating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16176278A JPS5591970A (en) | 1978-12-28 | 1978-12-28 | Ion plating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5591970A true JPS5591970A (en) | 1980-07-11 |
Family
ID=15741403
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16176278A Pending JPS5591970A (en) | 1978-12-28 | 1978-12-28 | Ion plating device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5591970A (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4961031A (en) * | 1972-10-17 | 1974-06-13 | ||
| JPS49113733A (en) * | 1973-03-05 | 1974-10-30 | ||
| JPS5169488A (en) * | 1974-12-12 | 1976-06-16 | Ulvac Corp | HIMAKUKEISEISOCHI |
-
1978
- 1978-12-28 JP JP16176278A patent/JPS5591970A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4961031A (en) * | 1972-10-17 | 1974-06-13 | ||
| JPS49113733A (en) * | 1973-03-05 | 1974-10-30 | ||
| JPS5169488A (en) * | 1974-12-12 | 1976-06-16 | Ulvac Corp | HIMAKUKEISEISOCHI |
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