JPS5591888A - Germanium light recieving element - Google Patents
Germanium light recieving elementInfo
- Publication number
- JPS5591888A JPS5591888A JP16506578A JP16506578A JPS5591888A JP S5591888 A JPS5591888 A JP S5591888A JP 16506578 A JP16506578 A JP 16506578A JP 16506578 A JP16506578 A JP 16506578A JP S5591888 A JPS5591888 A JP S5591888A
- Authority
- JP
- Japan
- Prior art keywords
- light receiving
- sio
- substrate
- protective film
- dark current
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Light Receiving Elements (AREA)
Abstract
PURPOSE: To reduce dark current and improve receiving sensitivity by using surface (111) of a germanium wafer as a light receiving surface, forming a pn-junction on this surface and coating it with a protective film of SiO2.
CONSTITUTION: Surface (111) of Ge wafer 1 is made into a light receiving surface, and a pn-junction is formed on this surface. This is provided with SiO2 protective film 3. A p-type Ge substrate 1 is provided with n+-type semiconductor layer 2, which is formed by diffusing Se or the like, on light receiving surface (111). The surface of this substrate is covered with protective film 3 made of SiO2, and electrode 4 and non-reflection coating film 5 are formed, and thereby Ge light receiving element (GeAPD) is made. In this GeAPD, surface recombination current flows in part 6a where depletion layer 6 expands in substrate 1, and dark current, independent of light projection, flows. Consequently, by choosing SiO2 film 3 of substrate 1 as light receiving surface (111), dark current can be reduced compared with the case when other surface directions are chosen.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16506578A JPS5591888A (en) | 1978-12-29 | 1978-12-29 | Germanium light recieving element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16506578A JPS5591888A (en) | 1978-12-29 | 1978-12-29 | Germanium light recieving element |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5591888A true JPS5591888A (en) | 1980-07-11 |
JPS6133265B2 JPS6133265B2 (en) | 1986-08-01 |
Family
ID=15805186
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16506578A Granted JPS5591888A (en) | 1978-12-29 | 1978-12-29 | Germanium light recieving element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5591888A (en) |
-
1978
- 1978-12-29 JP JP16506578A patent/JPS5591888A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6133265B2 (en) | 1986-08-01 |
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