JPS55853B2 - - Google Patents
Info
- Publication number
- JPS55853B2 JPS55853B2 JP6150275A JP6150275A JPS55853B2 JP S55853 B2 JPS55853 B2 JP S55853B2 JP 6150275 A JP6150275 A JP 6150275A JP 6150275 A JP6150275 A JP 6150275A JP S55853 B2 JPS55853 B2 JP S55853B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/077—Electron guns using discharge in gases or vapours as electron sources
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
- Particle Accelerators (AREA)
- Electron Beam Exposure (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL7407058A NL7407058A (nl) | 1974-05-27 | 1974-05-27 | Inrichting voor het gelijktijdig bedrijven van een aantal gasontladingselektronenkanonnen. |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS514495A JPS514495A (cs) | 1976-01-14 |
| JPS55853B2 true JPS55853B2 (cs) | 1980-01-10 |
Family
ID=19821435
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6150275A Expired JPS55853B2 (cs) | 1974-05-27 | 1975-05-24 |
Country Status (8)
| Country | Link |
|---|---|
| JP (1) | JPS55853B2 (cs) |
| AT (1) | AT331370B (cs) |
| CA (1) | CA1030588A (cs) |
| CH (1) | CH585964A5 (cs) |
| FR (1) | FR2273367B1 (cs) |
| GB (1) | GB1518153A (cs) |
| NL (1) | NL7407058A (cs) |
| SE (1) | SE398023B (cs) |
-
1974
- 1974-05-27 NL NL7407058A patent/NL7407058A/xx not_active Application Discontinuation
-
1975
- 1975-05-19 GB GB2117675A patent/GB1518153A/en not_active Expired
- 1975-05-20 CA CA227,384A patent/CA1030588A/en not_active Expired
- 1975-05-23 SE SE7505869A patent/SE398023B/xx not_active IP Right Cessation
- 1975-05-23 CH CH662975A patent/CH585964A5/xx not_active IP Right Cessation
- 1975-05-24 JP JP6150275A patent/JPS55853B2/ja not_active Expired
- 1975-05-26 AT AT399175A patent/AT331370B/de not_active IP Right Cessation
- 1975-05-27 FR FR7516428A patent/FR2273367B1/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS514495A (cs) | 1976-01-14 |
| DE2521427B2 (de) | 1976-10-21 |
| CA1030588A (en) | 1978-05-02 |
| AT331370B (de) | 1976-08-25 |
| FR2273367B1 (cs) | 1979-03-30 |
| NL7407058A (nl) | 1975-12-01 |
| GB1518153A (en) | 1978-07-19 |
| CH585964A5 (cs) | 1977-03-15 |
| SE7505869L (sv) | 1975-11-28 |
| ATA399175A (de) | 1975-11-15 |
| FR2273367A1 (cs) | 1975-12-26 |
| DE2521427A1 (de) | 1975-12-11 |
| SE398023B (sv) | 1977-11-28 |