JPS5582441A - Device for aligning mask - Google Patents

Device for aligning mask

Info

Publication number
JPS5582441A
JPS5582441A JP15598378A JP15598378A JPS5582441A JP S5582441 A JPS5582441 A JP S5582441A JP 15598378 A JP15598378 A JP 15598378A JP 15598378 A JP15598378 A JP 15598378A JP S5582441 A JPS5582441 A JP S5582441A
Authority
JP
Japan
Prior art keywords
mask
wafer
motors
piezoelectric
relative position
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15598378A
Other languages
Japanese (ja)
Inventor
Takuma Nakamura
Kazumi Sugizaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHIYOU LSI GIJUTSU KENKYU KUMIAI
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHIYOU LSI GIJUTSU KENKYU KUMIAI
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHIYOU LSI GIJUTSU KENKYU KUMIAI, CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHIYOU LSI GIJUTSU KENKYU KUMIAI
Priority to JP15598378A priority Critical patent/JPS5582441A/en
Publication of JPS5582441A publication Critical patent/JPS5582441A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE: To perform alignment with high accuracy in an automatic mask aligning device, by causing a computer to process a signal showing the relative position of a mask and a wafer and control motors for moving the wafer or the mask depending on their relative position.
CONSTITUTION: The position of a target on a wafer and that of another target on a mask are detected by photoelectric converters or the like. A mask aligner 61 supplies a necessary signal to a computer 64 to perform calculation. The result of the calculation is applied to a piezoelectric inching mechanism to drive piezoelectric minute- step motors 681, 682, 683 for variables x, y, θ through the motor controllers 671, 672, 673 of the inching mechanism to displace the wafer or the mask. The relative position of the mask and the wafer is detected to rapidly drive the piezoelectric motors toward an objective position. When the motors have passed through the objective position, they are slowly reversed to set the water or the maks in the objective position. The mask is thus aligned with high accuracy.
COPYRIGHT: (C)1980,JPO&Japio
JP15598378A 1978-12-14 1978-12-14 Device for aligning mask Pending JPS5582441A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15598378A JPS5582441A (en) 1978-12-14 1978-12-14 Device for aligning mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15598378A JPS5582441A (en) 1978-12-14 1978-12-14 Device for aligning mask

Publications (1)

Publication Number Publication Date
JPS5582441A true JPS5582441A (en) 1980-06-21

Family

ID=15617780

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15598378A Pending JPS5582441A (en) 1978-12-14 1978-12-14 Device for aligning mask

Country Status (1)

Country Link
JP (1) JPS5582441A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120079690A1 (en) * 2010-09-30 2012-04-05 Daishi Arimatsu Method of piezoelectric vibrating piece, wafer, piezoelectric vibrator, oscillator, electronic apparatus, and radio-controlled timepiece

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5117031A (en) * 1974-08-03 1976-02-10 Hitachi Ltd TEIRYURYO SOCHI

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5117031A (en) * 1974-08-03 1976-02-10 Hitachi Ltd TEIRYURYO SOCHI

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120079690A1 (en) * 2010-09-30 2012-04-05 Daishi Arimatsu Method of piezoelectric vibrating piece, wafer, piezoelectric vibrator, oscillator, electronic apparatus, and radio-controlled timepiece

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