JPS5578203A - Interference signal processing method for fourier transformation spectrometer and measurement of thickness of adhered layer using it - Google Patents

Interference signal processing method for fourier transformation spectrometer and measurement of thickness of adhered layer using it

Info

Publication number
JPS5578203A
JPS5578203A JP15101678A JP15101678A JPS5578203A JP S5578203 A JPS5578203 A JP S5578203A JP 15101678 A JP15101678 A JP 15101678A JP 15101678 A JP15101678 A JP 15101678A JP S5578203 A JPS5578203 A JP S5578203A
Authority
JP
Japan
Prior art keywords
signal
interference
mirror
interference signal
converted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15101678A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6250768B2 (enrdf_load_stackoverflow
Inventor
Masashi Yamamoto
Masahiko Ozawa
Koji Masutani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Hitachi Ltd
Original Assignee
Jeol Ltd
Hitachi Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Hitachi Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP15101678A priority Critical patent/JPS5578203A/ja
Publication of JPS5578203A publication Critical patent/JPS5578203A/ja
Publication of JPS6250768B2 publication Critical patent/JPS6250768B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G01J3/453—Interferometric spectrometry by correlation of the amplitudes

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
JP15101678A 1978-12-08 1978-12-08 Interference signal processing method for fourier transformation spectrometer and measurement of thickness of adhered layer using it Granted JPS5578203A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15101678A JPS5578203A (en) 1978-12-08 1978-12-08 Interference signal processing method for fourier transformation spectrometer and measurement of thickness of adhered layer using it

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15101678A JPS5578203A (en) 1978-12-08 1978-12-08 Interference signal processing method for fourier transformation spectrometer and measurement of thickness of adhered layer using it

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP22008085A Division JPS61111427A (ja) 1985-10-04 1985-10-04 フ−リエ変換スペクトロメ−タの干渉信号処理方法
JP22008185A Division JPS61111407A (ja) 1985-10-04 1985-10-04 付着層の厚さ測定法

Publications (2)

Publication Number Publication Date
JPS5578203A true JPS5578203A (en) 1980-06-12
JPS6250768B2 JPS6250768B2 (enrdf_load_stackoverflow) 1987-10-27

Family

ID=15509445

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15101678A Granted JPS5578203A (en) 1978-12-08 1978-12-08 Interference signal processing method for fourier transformation spectrometer and measurement of thickness of adhered layer using it

Country Status (1)

Country Link
JP (1) JPS5578203A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63222207A (ja) * 1987-03-11 1988-09-16 Japan Spectroscopic Co 凹部深さ・膜厚測定装置
JPH04160610A (ja) * 1990-10-25 1992-06-03 Fujitsu Ten Ltd 移動体の駆動装置
JP2011518312A (ja) * 2007-12-14 2011-06-23 インテクプラス カンパニー、リミテッド 立体形状測定装置

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01242443A (ja) * 1988-03-24 1989-09-27 Nippon Denshi Zairyo Kk ガラス基板
JPH02133475U (enrdf_load_stackoverflow) * 1989-04-10 1990-11-06

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50120473U (enrdf_load_stackoverflow) * 1974-03-15 1975-10-01

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50120473U (enrdf_load_stackoverflow) * 1974-03-15 1975-10-01

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63222207A (ja) * 1987-03-11 1988-09-16 Japan Spectroscopic Co 凹部深さ・膜厚測定装置
JPH04160610A (ja) * 1990-10-25 1992-06-03 Fujitsu Ten Ltd 移動体の駆動装置
JP2011518312A (ja) * 2007-12-14 2011-06-23 インテクプラス カンパニー、リミテッド 立体形状測定装置

Also Published As

Publication number Publication date
JPS6250768B2 (enrdf_load_stackoverflow) 1987-10-27

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