JPS5565432A - Sealed-type vacuum vessel - Google Patents

Sealed-type vacuum vessel

Info

Publication number
JPS5565432A
JPS5565432A JP13887278A JP13887278A JPS5565432A JP S5565432 A JPS5565432 A JP S5565432A JP 13887278 A JP13887278 A JP 13887278A JP 13887278 A JP13887278 A JP 13887278A JP S5565432 A JPS5565432 A JP S5565432A
Authority
JP
Japan
Prior art keywords
cap
proper
close
open
tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13887278A
Other languages
Japanese (ja)
Inventor
Masao Tsugi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13887278A priority Critical patent/JPS5565432A/en
Publication of JPS5565432A publication Critical patent/JPS5565432A/en
Pending legal-status Critical Current

Links

Landscapes

  • Pressure Vessels And Lids Thereof (AREA)

Abstract

PURPOSE: To improve airtightness and automate open-and-close of a cap by providing an open-and-close mechanism performing an oscillating open-and-close of a cap facing a vacuum vessel proper and by pressing the cap against said vessel proper with prescribed pressure at the time of closing operation of said mechanism.
CONSTITUTION: A core tube proper 12 of a sealed-type vacuum vessel is provided with a narrow tail tube 10 guiding carrier gas and the like into a tube and on the side a pipe bend 11 guiding used gas out is provided. A disc-like cap 13 is provided overlapping a work taking-out at another end of said core tube proper 12 and the upper part of said cap is provided with a support 14 extruding in the peripheral direction and to said support 14 a tip of an axis of rotation is fixed. Futher to another end of said axis of rotation 15 an output end of a normal torque driving mechanism 16 is fixed. By connecting an input end of said mechanism 16 with a motor 17 the mechanism 16 controls open-and-close of the cap 13 facing the tube proper 12, thus automating the control of the cap 13 as well as improving airtightness.
COPYRIGHT: (C)1980,JPO&Japio
JP13887278A 1978-11-13 1978-11-13 Sealed-type vacuum vessel Pending JPS5565432A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13887278A JPS5565432A (en) 1978-11-13 1978-11-13 Sealed-type vacuum vessel

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13887278A JPS5565432A (en) 1978-11-13 1978-11-13 Sealed-type vacuum vessel

Publications (1)

Publication Number Publication Date
JPS5565432A true JPS5565432A (en) 1980-05-16

Family

ID=15232075

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13887278A Pending JPS5565432A (en) 1978-11-13 1978-11-13 Sealed-type vacuum vessel

Country Status (1)

Country Link
JP (1) JPS5565432A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57121246A (en) * 1981-01-21 1982-07-28 Hitachi Ltd Semiconductor treating device
US4898602A (en) * 1988-03-28 1990-02-06 Gruber Thomas J Selectively openable filtering assembly
US5850934A (en) * 1993-12-30 1998-12-22 Kumar; M. Lalith Pressure vessel seal with self-energizing seal

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57121246A (en) * 1981-01-21 1982-07-28 Hitachi Ltd Semiconductor treating device
US4898602A (en) * 1988-03-28 1990-02-06 Gruber Thomas J Selectively openable filtering assembly
US5850934A (en) * 1993-12-30 1998-12-22 Kumar; M. Lalith Pressure vessel seal with self-energizing seal

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